Effect of short-pulsed 200 keV C+ ion beam and continuous 350 keV He2+ ion beam irradiation on optical properties of Al-Si-N coatings with a various Si content

F. Konusov, S. Pavlov, A. Lauk, V. Tarbokov, S. Karpov, V. Karpov, R. Gadirov, E. Kashkarov, G. Remnev

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