Abstract
Methods of X ray diffraction analysis, mass spectrometry, and atomic force microscopy have been used to perform a comparative analysis of factors that cause the appearance of residual stresses in TiN coatings deposited by reactive magnetron sputtering and to study their effect on specific magnetic losses in electrical sheet steel. Physical and mechanical parameters of coatings, such as hardness, elastic modulus, residual stress, microstructure, and surface morphology, have been studied. It has been shown that the level of internal stresses in a coating depends on its thickness and increases with increasing quantity and energy of ions in the deposited beam. The maximum magnitudes of compressive stresses in coatings (13 GPa) were obtained when using an unbalanced working regime of the magnetron and a negative bias at the substrate. The hardness of coatings produced under such conditions reaches 29 GPa. There has been demonstrated a possi-bility of reducing losses in electrical sheet steels by about 15% by depositing surface coatings with high compressive stresses.
| Original language | English |
|---|---|
| Pages (from-to) | 111-119 |
| Number of pages | 9 |
| Journal | Physics of Metals and Metallography |
| Volume | 109 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 1 Feb 2010 |
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Keywords
- Coatings
- Electrical steel
- Internal stresses
- Ion bombardment
- Magnetron sputtering
ASJC Scopus subject areas
- Condensed Matter Physics
- Materials Chemistry
Cite this
Effect of residual internal stresses in TiN coatings On specific losses in anisotropic electrical steel. / Solov'ev, A. A.; Sochugov, N. S.; Oskomov, K. V.
In: Physics of Metals and Metallography, Vol. 109, No. 2, 01.02.2010, p. 111-119.Research output: Contribution to journal › Article
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TY - JOUR
T1 - Effect of residual internal stresses in TiN coatings On specific losses in anisotropic electrical steel
AU - Solov'ev, A. A.
AU - Sochugov, N. S.
AU - Oskomov, K. V.
PY - 2010/2/1
Y1 - 2010/2/1
N2 - Methods of X ray diffraction analysis, mass spectrometry, and atomic force microscopy have been used to perform a comparative analysis of factors that cause the appearance of residual stresses in TiN coatings deposited by reactive magnetron sputtering and to study their effect on specific magnetic losses in electrical sheet steel. Physical and mechanical parameters of coatings, such as hardness, elastic modulus, residual stress, microstructure, and surface morphology, have been studied. It has been shown that the level of internal stresses in a coating depends on its thickness and increases with increasing quantity and energy of ions in the deposited beam. The maximum magnitudes of compressive stresses in coatings (13 GPa) were obtained when using an unbalanced working regime of the magnetron and a negative bias at the substrate. The hardness of coatings produced under such conditions reaches 29 GPa. There has been demonstrated a possi-bility of reducing losses in electrical sheet steels by about 15% by depositing surface coatings with high compressive stresses.
AB - Methods of X ray diffraction analysis, mass spectrometry, and atomic force microscopy have been used to perform a comparative analysis of factors that cause the appearance of residual stresses in TiN coatings deposited by reactive magnetron sputtering and to study their effect on specific magnetic losses in electrical sheet steel. Physical and mechanical parameters of coatings, such as hardness, elastic modulus, residual stress, microstructure, and surface morphology, have been studied. It has been shown that the level of internal stresses in a coating depends on its thickness and increases with increasing quantity and energy of ions in the deposited beam. The maximum magnitudes of compressive stresses in coatings (13 GPa) were obtained when using an unbalanced working regime of the magnetron and a negative bias at the substrate. The hardness of coatings produced under such conditions reaches 29 GPa. There has been demonstrated a possi-bility of reducing losses in electrical sheet steels by about 15% by depositing surface coatings with high compressive stresses.
KW - Coatings
KW - Electrical steel
KW - Internal stresses
KW - Ion bombardment
KW - Magnetron sputtering
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U2 - 10.1134/S0031918X1002002X
DO - 10.1134/S0031918X1002002X
M3 - Article
VL - 109
SP - 111
EP - 119
JO - Physics of Metals and Metallography
JF - Physics of Metals and Metallography
SN - 0031-918X
IS - 2
ER -