Abstract
The paper studies the effect of annealing on the structure and properties of N-doped TiO2 films, deposited by reactive magnetron sputtering. An increase in the annealing temperature results in a reduction of the film thickness and a rise of the refractive index. The post annealing induces the anatase-rutile phase transition and also leads to band gap narrowing and wettability transition.
| Original language | English |
|---|---|
| Article number | 012083 |
| Journal | Journal of Physics: Conference Series |
| Volume | 1281 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 12 Aug 2019 |
| Event | 14th International Conference on Films and Coatings, ICFC 2019 - Saint Petersburg, Russian Federation Duration: 14 May 2019 → 16 May 2019 |
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ASJC Scopus subject areas
- Physics and Astronomy(all)
Cite this
Effect of post annealing on properties of N-doped TiO2 films deposited by reactive magnetron sputtering. / Sun, Zhilei; Evdokimov, K. E.; Konishchev, M. E.; Kuzmin, O. S.; Pichugin, V. F.
In: Journal of Physics: Conference Series, Vol. 1281, No. 1, 012083, 12.08.2019.Research output: Contribution to journal › Conference article
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TY - JOUR
T1 - Effect of post annealing on properties of N-doped TiO2 films deposited by reactive magnetron sputtering
AU - Sun, Zhilei
AU - Evdokimov, K. E.
AU - Konishchev, M. E.
AU - Kuzmin, O. S.
AU - Pichugin, V. F.
PY - 2019/8/12
Y1 - 2019/8/12
N2 - The paper studies the effect of annealing on the structure and properties of N-doped TiO2 films, deposited by reactive magnetron sputtering. An increase in the annealing temperature results in a reduction of the film thickness and a rise of the refractive index. The post annealing induces the anatase-rutile phase transition and also leads to band gap narrowing and wettability transition.
AB - The paper studies the effect of annealing on the structure and properties of N-doped TiO2 films, deposited by reactive magnetron sputtering. An increase in the annealing temperature results in a reduction of the film thickness and a rise of the refractive index. The post annealing induces the anatase-rutile phase transition and also leads to band gap narrowing and wettability transition.
UR - http://www.scopus.com/inward/record.url?scp=85072213930&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85072213930&partnerID=8YFLogxK
U2 - 10.1088/1742-6596/1281/1/012083
DO - 10.1088/1742-6596/1281/1/012083
M3 - Conference article
AN - SCOPUS:85072213930
VL - 1281
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
SN - 1742-6588
IS - 1
M1 - 012083
ER -