The paper studies the effect of annealing on the structure and properties of N-doped TiO2 films, deposited by reactive magnetron sputtering. An increase in the annealing temperature results in a reduction of the film thickness and a rise of the refractive index. The post annealing induces the anatase-rutile phase transition and also leads to band gap narrowing and wettability transition.
|Journal||Journal of Physics: Conference Series|
|Publication status||Published - 12 Aug 2019|
|Event||14th International Conference on Films and Coatings, ICFC 2019 - Saint Petersburg, Russian Federation|
Duration: 14 May 2019 → 16 May 2019
ASJC Scopus subject areas
- Physics and Astronomy(all)