Abstract
The paper studies the effect of annealing on the structure and properties of N-doped TiO2 films, deposited by reactive magnetron sputtering. An increase in the annealing temperature results in a reduction of the film thickness and a rise of the refractive index. The post annealing induces the anatase-rutile phase transition and also leads to band gap narrowing and wettability transition.
Original language | English |
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Article number | 012083 |
Journal | Journal of Physics: Conference Series |
Volume | 1281 |
Issue number | 1 |
DOIs | |
Publication status | Published - 12 Aug 2019 |
Event | 14th International Conference on Films and Coatings, ICFC 2019 - Saint Petersburg, Russian Federation Duration: 14 May 2019 → 16 May 2019 |
ASJC Scopus subject areas
- Physics and Astronomy(all)