Effect of nitrogen on tribological properties of amorphous carbon films alloyed with titanium

J. Musil, M. Hromadka, Petr Novák

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Abstract

The article reports on the dependency of friction and wear of a-(Ti,C,N) films on the nitrogen content. The amount of nitrogen N in the film was controlled by partial pressure of nitrogen pN2 in the Ar+N2 sputtering gas mixture. It is shown that the incorporation of N in the film results in the increase of (i) the coefficient of friction μ (increases from 0.12 to 0.37), (ii) the coefficient of wear k (increases from 0.16×10-6 to 0.93×10-6mm3/Nm) and the decrease of (i) the film hardness H, (ii) effective Young's modulus E*, (iii) the elastic recovery We of film and (iv) the ratio H/E*. The changes of μ and k of the a-(Ti,C,N) film correlate well with changes of the film mechanical properties (H and E*) and its mechanical behavior (We, H/E* and the ratio H3/E*2) characterizing the film resistance to plastic deformation.

Original languageEnglish
JournalSurface and Coatings Technology
Volume205
Issue numberSUPPL. 2
DOIs
Publication statusPublished - 25 Jul 2011

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Keywords

  • Friction
  • Mechanical properties
  • Reactive magnetron sputtering
  • Ti(N,C)/a-C films
  • Wear

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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