Effect of material of the crucible on operation of magnetron sputtering system with liquid-phase target

Alena V. Yuryeva, Artyom S. Shabunin, Dmitry V. Korzhenko, Olga S. Korneva, Mikhail V. Nikolaev

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

The paper presents a high-rate method for metal coating deposition by the means of magnetron sputtering system (MSS) with liquid-phase target. Maximum copper deposition rate at a power density of 55 W/cm2 is 200 nm/s, which is twenty times higher than if an ordinary magnetron is used. The effect of material of the crucible on operation of MSS with liquid-phase target and copper coating deposition rate is studied. It is demonstrated that using the crucible with a lower emissivity allows the several-fold increase in deposition rate.

Original languageEnglish
Pages (from-to)135-138
Number of pages4
JournalVacuum
Volume141
DOIs
Publication statusPublished - 1 Jul 2017

Keywords

  • High-rate coating deposition
  • Liquid-phase target
  • Magnetron sputtering systems

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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