Effect of magnetron deposition conditions on the structure, phase composition and properties of the coatings on the basis of the Al-Si-N system

I. A. Bozhko, E. V. Rybalko, M. V. Fedorischeva, V. P. Sergeev

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Coatings on the basis of Al-Si-N system produced by the pulsed magnetron sputtering at different temperatures of the KV quartz glass substrate were carried out. It has been established by the X-ray analysis, that the composite coatings of the Al-Si-N system contain the AlN (hcp), α-Si3N4 and β-Si3N4 phases, whose ratio depends on the temperature of the substrate during the deposition. Investigation of the optical properties has shown that the transmittance for all coatings is ∼75-85%. The protective coatings of the Al-Si-N system produced by the pulsed magnetron deposition are characterized by high nanohardness values (∼27 GPa) along with high values of the elastic recovery coefficient (Re ≥ 0.70).

Original languageEnglish
Title of host publicationProceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017
PublisherAmerican Institute of Physics Inc.
Volume1909
ISBN (Electronic)9780735416017
DOIs
Publication statusPublished - 1 Dec 2017
EventInternational Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017 - Tomsk, Russian Federation
Duration: 9 Oct 201713 Oct 2017

Conference

ConferenceInternational Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017
CountryRussian Federation
CityTomsk
Period9.10.1713.10.17

Fingerprint

coatings
protective coatings
transmittance
magnetron sputtering
quartz
recovery
optical properties
composite materials
temperature
glass
coefficients
x rays

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Bozhko, I. A., Rybalko, E. V., Fedorischeva, M. V., & Sergeev, V. P. (2017). Effect of magnetron deposition conditions on the structure, phase composition and properties of the coatings on the basis of the Al-Si-N system. In Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017 (Vol. 1909). [020020] American Institute of Physics Inc.. https://doi.org/10.1063/1.5013701

Effect of magnetron deposition conditions on the structure, phase composition and properties of the coatings on the basis of the Al-Si-N system. / Bozhko, I. A.; Rybalko, E. V.; Fedorischeva, M. V.; Sergeev, V. P.

Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017. Vol. 1909 American Institute of Physics Inc., 2017. 020020.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Bozhko, IA, Rybalko, EV, Fedorischeva, MV & Sergeev, VP 2017, Effect of magnetron deposition conditions on the structure, phase composition and properties of the coatings on the basis of the Al-Si-N system. in Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017. vol. 1909, 020020, American Institute of Physics Inc., International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017, Tomsk, Russian Federation, 9.10.17. https://doi.org/10.1063/1.5013701
Bozhko IA, Rybalko EV, Fedorischeva MV, Sergeev VP. Effect of magnetron deposition conditions on the structure, phase composition and properties of the coatings on the basis of the Al-Si-N system. In Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017. Vol. 1909. American Institute of Physics Inc. 2017. 020020 https://doi.org/10.1063/1.5013701
Bozhko, I. A. ; Rybalko, E. V. ; Fedorischeva, M. V. ; Sergeev, V. P. / Effect of magnetron deposition conditions on the structure, phase composition and properties of the coatings on the basis of the Al-Si-N system. Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017. Vol. 1909 American Institute of Physics Inc., 2017.
@inproceedings{9b09d297987c46acaba330a48c9467d4,
title = "Effect of magnetron deposition conditions on the structure, phase composition and properties of the coatings on the basis of the Al-Si-N system",
abstract = "Coatings on the basis of Al-Si-N system produced by the pulsed magnetron sputtering at different temperatures of the KV quartz glass substrate were carried out. It has been established by the X-ray analysis, that the composite coatings of the Al-Si-N system contain the AlN (hcp), α-Si3N4 and β-Si3N4 phases, whose ratio depends on the temperature of the substrate during the deposition. Investigation of the optical properties has shown that the transmittance for all coatings is ∼75-85{\%}. The protective coatings of the Al-Si-N system produced by the pulsed magnetron deposition are characterized by high nanohardness values (∼27 GPa) along with high values of the elastic recovery coefficient (Re ≥ 0.70).",
author = "Bozhko, {I. A.} and Rybalko, {E. V.} and Fedorischeva, {M. V.} and Sergeev, {V. P.}",
year = "2017",
month = "12",
day = "1",
doi = "10.1063/1.5013701",
language = "English",
volume = "1909",
booktitle = "Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017",
publisher = "American Institute of Physics Inc.",

}

TY - GEN

T1 - Effect of magnetron deposition conditions on the structure, phase composition and properties of the coatings on the basis of the Al-Si-N system

AU - Bozhko, I. A.

AU - Rybalko, E. V.

AU - Fedorischeva, M. V.

AU - Sergeev, V. P.

PY - 2017/12/1

Y1 - 2017/12/1

N2 - Coatings on the basis of Al-Si-N system produced by the pulsed magnetron sputtering at different temperatures of the KV quartz glass substrate were carried out. It has been established by the X-ray analysis, that the composite coatings of the Al-Si-N system contain the AlN (hcp), α-Si3N4 and β-Si3N4 phases, whose ratio depends on the temperature of the substrate during the deposition. Investigation of the optical properties has shown that the transmittance for all coatings is ∼75-85%. The protective coatings of the Al-Si-N system produced by the pulsed magnetron deposition are characterized by high nanohardness values (∼27 GPa) along with high values of the elastic recovery coefficient (Re ≥ 0.70).

AB - Coatings on the basis of Al-Si-N system produced by the pulsed magnetron sputtering at different temperatures of the KV quartz glass substrate were carried out. It has been established by the X-ray analysis, that the composite coatings of the Al-Si-N system contain the AlN (hcp), α-Si3N4 and β-Si3N4 phases, whose ratio depends on the temperature of the substrate during the deposition. Investigation of the optical properties has shown that the transmittance for all coatings is ∼75-85%. The protective coatings of the Al-Si-N system produced by the pulsed magnetron deposition are characterized by high nanohardness values (∼27 GPa) along with high values of the elastic recovery coefficient (Re ≥ 0.70).

UR - http://www.scopus.com/inward/record.url?scp=85038562577&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85038562577&partnerID=8YFLogxK

U2 - 10.1063/1.5013701

DO - 10.1063/1.5013701

M3 - Conference contribution

VL - 1909

BT - Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017

PB - American Institute of Physics Inc.

ER -