Effect of duty cycle and frequency on the ion current density on substrate and ion/atom ratio in magnetron sputtering of aluminum

Vladimir Oskirko, Andrey Solovyev, Alexander Zakharov, Vyacheslav Semenov, Artem Pavlov

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The paper presents the results of a study of the influence of the pulse frequency and duty cycle on the Al deposition rate, the ion current density, the ion/atom ratio and the thermal flux on a substrate during the pulsed magnetron sputtering process. Experiments were performed over a wide range of pulse frequencies (1÷200 kHz), duty cycle (5÷50%) and peak discharge power (1÷63 kW) at a constant average discharge power of 1 kW. Results were compared with DC mode of sputtering. It was found that for each duty cycle, there is an optimal pulse frequency at which the ion current on a substrate is maximum. Adjusting the pulses parameters allows increasing the density of the ion current several times. It was found that there is an optimal pulse frequency for each duty cycle value, at which the ion current on a substrate is maximum. Adjusting the pulses parameters allows increasing the ion current density on a substrate several times. A decrease in the deposition rate with a decrease of duty cycle causes a sharp increase in the ion/atom ratio, as well as in the specific energy per deposited atom. It is shown that the total thermal flux on a substrate weakly depends on the sputtering mode.

Original languageEnglish
Title of host publicationProceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages822-826
Number of pages5
ISBN (Electronic)9781728126869
DOIs
Publication statusPublished - 14 Sep 2020
Externally publishedYes
Event7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020 - Virtual, Tomsk, Russian Federation
Duration: 14 Sep 202026 Sep 2020

Publication series

NameProceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020

Conference

Conference7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020
CountryRussian Federation
CityVirtual, Tomsk
Period14.9.2026.9.20

Keywords

  • Duty cycle
  • HIPIMS
  • Ion-to-atom ratio
  • Magnetron sputtering
  • Power supply
  • Thermal flux

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Energy Engineering and Power Technology

Fingerprint Dive into the research topics of 'Effect of duty cycle and frequency on the ion current density on substrate and ion/atom ratio in magnetron sputtering of aluminum'. Together they form a unique fingerprint.

Cite this