Effect of aluminum content on the performance of coatings based on Al-Si-N

Irina A. Bozhko, Evgeniya V. Rybalko, Mark Petrovich Kalashnikov, Marina Vladimirovna Fedorishcheva, Victor Petrovich Sergeev

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The transparent coatings on the basis of Al- Si- N system with high Al content and the opaque Al-Si-N with a low Al content were prepared by impulse magnetron sputtering method. Structural-phase state of the two types of coatings was examined by X-ray analysis. The microhardness was measured by nanoindentation method. The microhardness, the elastic modulus and the coefficient of elastic recovery were determined. Also the optical transmission was measured for all types of samples.

Original languageEnglish
Title of host publicationKey Engineering Materials
PublisherTrans Tech Publications Ltd
Pages591-595
Number of pages5
Volume685
ISBN (Print)9783038357087
DOIs
Publication statusPublished - 2016
Event4th International Conference for Young Scientists High Technology: Research and Applications, HTRA 2015 - Tomsk, Russian Federation
Duration: 21 Apr 201524 Apr 2015

Publication series

NameKey Engineering Materials
Volume685
ISSN (Print)10139826

Other

Other4th International Conference for Young Scientists High Technology: Research and Applications, HTRA 2015
CountryRussian Federation
CityTomsk
Period21.4.1524.4.15

Keywords

  • Magnetron deposition
  • Nanocomposite coating
  • Optical and mechanical properties
  • Structure-phase state
  • Transparent coatings

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Bozhko, I. A., Rybalko, E. V., Kalashnikov, M. P., Fedorishcheva, M. V., & Sergeev, V. P. (2016). Effect of aluminum content on the performance of coatings based on Al-Si-N. In Key Engineering Materials (Vol. 685, pp. 591-595). (Key Engineering Materials; Vol. 685). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/KEM.685.591