Abstract
The article reports on the effect of Al addition on the structure, macrostress σ, mechanical properties and oxidation resistance of TiC-Al thin films. These films were sputtered using dc unbalanced magnetron equipped with a TiC target (purity 99.95%) fixed with an Al (99.99%) fixing ring of various inner diameters Øin. It was found that a continuous increase in Al content in the TiC-Al film results in (i) gradual change of the film structure from the crystalline TiC through X-ray amorphous TiC-Al to the crystalline Al2Ti, (ii) decrease in the compressive macrostress (σ<0) up to its conversion to the tensile one (σ>0), (iii) decrease in film microhardness, H and (iv) increase in its oxidation resistance.
| Original language | English |
|---|---|
| Journal | Plasma Processes and Polymers |
| Volume | 4 |
| Issue number | SUPPL.1 |
| DOIs | |
| Publication status | Published - 1 Dec 2007 |
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Keywords
- Al doping
- Magnetron sputtering
- Mechanical properties
- Oxidation resistance
- Structure
- TiC-Al films
ASJC Scopus subject areas
- Condensed Matter Physics
- Polymers and Plastics
Cite this
Effect of Al addition on structure and properties of sputtered TiC films. / Soldán, Jan; Musil, Jindrřich; Zeman, Petr.
In: Plasma Processes and Polymers, Vol. 4, No. SUPPL.1, 01.12.2007.Research output: Contribution to journal › Article
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TY - JOUR
T1 - Effect of Al addition on structure and properties of sputtered TiC films
AU - Soldán, Jan
AU - Musil, Jindrřich
AU - Zeman, Petr
PY - 2007/12/1
Y1 - 2007/12/1
N2 - The article reports on the effect of Al addition on the structure, macrostress σ, mechanical properties and oxidation resistance of TiC-Al thin films. These films were sputtered using dc unbalanced magnetron equipped with a TiC target (purity 99.95%) fixed with an Al (99.99%) fixing ring of various inner diameters Øin. It was found that a continuous increase in Al content in the TiC-Al film results in (i) gradual change of the film structure from the crystalline TiC through X-ray amorphous TiC-Al to the crystalline Al2Ti, (ii) decrease in the compressive macrostress (σ<0) up to its conversion to the tensile one (σ>0), (iii) decrease in film microhardness, H and (iv) increase in its oxidation resistance.
AB - The article reports on the effect of Al addition on the structure, macrostress σ, mechanical properties and oxidation resistance of TiC-Al thin films. These films were sputtered using dc unbalanced magnetron equipped with a TiC target (purity 99.95%) fixed with an Al (99.99%) fixing ring of various inner diameters Øin. It was found that a continuous increase in Al content in the TiC-Al film results in (i) gradual change of the film structure from the crystalline TiC through X-ray amorphous TiC-Al to the crystalline Al2Ti, (ii) decrease in the compressive macrostress (σ<0) up to its conversion to the tensile one (σ>0), (iii) decrease in film microhardness, H and (iv) increase in its oxidation resistance.
KW - Al doping
KW - Magnetron sputtering
KW - Mechanical properties
KW - Oxidation resistance
KW - Structure
KW - TiC-Al films
UR - http://www.scopus.com/inward/record.url?scp=50449083062&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=50449083062&partnerID=8YFLogxK
U2 - 10.1002/ppap.200730102
DO - 10.1002/ppap.200730102
M3 - Article
AN - SCOPUS:50449083062
VL - 4
JO - Plasma Processes and Polymers
JF - Plasma Processes and Polymers
SN - 1612-8850
IS - SUPPL.1
ER -