Abstract
The formation of optically-transparent films of fusible materials like zinc, lead, bismuth on glass substrates to obtain single-mode optical diffusive waveguides is considered. The quality of films for waveguides depends on the amount of oxygen in residual environment, the gas exchange rate in the working chamber, the rate of oxygen desorption from the heated elements in vacuum chamber, the evaporator and the substrate. The regularities of variations of local layer thickness and the procedure phase diagram from the local gas exchange rate are determined.
| Original language | English |
|---|---|
| Article number | 012089 |
| Journal | IOP Conference Series: Materials Science and Engineering |
| Volume | 110 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 23 Feb 2016 |
| Event | 11th International Scientific Conference on Radiation-Thermal Effects and Processes in Inorganic Materials 2015, RTEP 2015 - Tomsk, Russian Federation Duration: 31 Aug 2015 → 10 Sep 2015 |
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ASJC Scopus subject areas
- Materials Science(all)
- Engineering(all)
Cite this
Dynamic processes happening during the evaporation of films of fusible materials. / Orlikov, L. N.; Orlikov, N. L.; Ghyngazov, S. A.; Shandarov, S. M.
In: IOP Conference Series: Materials Science and Engineering, Vol. 110, No. 1, 012089, 23.02.2016.Research output: Contribution to journal › Conference article
}
TY - JOUR
T1 - Dynamic processes happening during the evaporation of films of fusible materials
AU - Orlikov, L. N.
AU - Orlikov, N. L.
AU - Ghyngazov, S. A.
AU - Shandarov, S. M.
PY - 2016/2/23
Y1 - 2016/2/23
N2 - The formation of optically-transparent films of fusible materials like zinc, lead, bismuth on glass substrates to obtain single-mode optical diffusive waveguides is considered. The quality of films for waveguides depends on the amount of oxygen in residual environment, the gas exchange rate in the working chamber, the rate of oxygen desorption from the heated elements in vacuum chamber, the evaporator and the substrate. The regularities of variations of local layer thickness and the procedure phase diagram from the local gas exchange rate are determined.
AB - The formation of optically-transparent films of fusible materials like zinc, lead, bismuth on glass substrates to obtain single-mode optical diffusive waveguides is considered. The quality of films for waveguides depends on the amount of oxygen in residual environment, the gas exchange rate in the working chamber, the rate of oxygen desorption from the heated elements in vacuum chamber, the evaporator and the substrate. The regularities of variations of local layer thickness and the procedure phase diagram from the local gas exchange rate are determined.
UR - http://www.scopus.com/inward/record.url?scp=84971635831&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84971635831&partnerID=8YFLogxK
U2 - 10.1088/1757-899X/110/1/012089
DO - 10.1088/1757-899X/110/1/012089
M3 - Conference article
AN - SCOPUS:84971635831
VL - 110
JO - IOP Conference Series: Materials Science and Engineering
JF - IOP Conference Series: Materials Science and Engineering
SN - 1757-8981
IS - 1
M1 - 012089
ER -