Dual mode of deep oscillation magnetron sputtering

V. O. Oskirko, A. N. Zakharov, A. P. Pavlov, A. A. Solovyev, A. S. Grenadyorov, V. A. Semenov

Research output: Contribution to journalArticlepeer-review

Abstract

The paper presents the results of an experimental investigation on the dual-target mode of deep oscillation magnetron sputtering (DOMS). To power the dual DOMS discharge, high-power bipolar micropulse packets were used, which form a 1–3-ms-duration macropulses. The current-voltage characteristic of discharge was measured in the dual DOMS mode, and the pulse waveform of the ion current on the substrate was analyzed. It is shown that during a macropulse, the substrate is exposed to a continuous ion bombardment. Plasma parameters, such as electron temperature, electron concentration, and ion current density were measured and compared using a triple Langmuir probe in three sputtering modes (DC, dual mid-frequency and dual DOMS). Moreover, the ion-to-atom arrival ratio on the substrate was evaluated for the indicated modes of sputtering aluminum targets. The dual DOMS capabilities were demonstrated by Al2O3 and TiO2 dielectric coating deposition in the reactive sputtering mode. The possibility was shown for arc-free coating deposition with the sputtering mode stabilization via control for parameters of electrical discharges. Aluminum oxides obtained at a low (300 °C) substrate temperature, include θ-phase, possess rather high hardness (15 GPa) and large transmission in the visible range. Titanium oxide coatings are characterized by 11 GPa hardness, 3.1–3.5 eV band gap width and consist mostly of the rutile phase.

Original languageEnglish
Article number125559
JournalSurface and Coatings Technology
Volume387
DOIs
Publication statusPublished - 15 Apr 2020
Externally publishedYes

Keywords

  • AlO coating
  • Deep oscillation magnetron sputtering
  • Dual magnetron sputtering
  • Plasma parameters
  • Reactive sputtering
  • TiO coating

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Fingerprint Dive into the research topics of 'Dual mode of deep oscillation magnetron sputtering'. Together they form a unique fingerprint.

Cite this