Distinguishing between individual contributions to the via resistance in carbon nanotubes based interconnects

Holger Fiedler, Marius Toader, Sascha Hermann, Raul D. Rodriguez, Evgeniya Sheremet, Michael Rennau, Steffen Schulze, Thomas Waechtler, Michael Hietschold, Dietrich R.T. Zahn, Stefan E. Schulz, Thomas Gessnera

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6 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science