Dispersive optical parameters of evaporated nickel films

Victor V. Atuchin, Tatiana I. Grigorieva, Vladimir N. Kruchinin, Dmitry V. Lychagin, Lev D. Pokrovsky

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    Dispersion of refractive index and extinction coefficient of nickel film and nickel crystal surface (100) has been determined with spectroscopic ellipsometry over spectral range λ ∼ 250-1030 nm. Nickel film has been prepared by thermal evaporation method. Nickel crystal has been grown by horizontal Bridgman method. The crystal surface (100) at a first stage was mechanically polished and then treated by electro-polishing to remove the damage layer.

    Original languageEnglish
    Title of host publication2010 11th Annual International Conference and Seminar on Micro/Nanotechnologies and Electron Devices, EDM'2010 - Proceedings
    Pages37-39
    Number of pages3
    DOIs
    Publication statusPublished - 2010
    Event2010 11th Annual International Conference and Seminar on Micro/Nanotechnologies and Electron Devices, EDM'2010 - Altai, Russian Federation
    Duration: 30 Jun 20104 Jul 2010

    Other

    Other2010 11th Annual International Conference and Seminar on Micro/Nanotechnologies and Electron Devices, EDM'2010
    CountryRussian Federation
    CityAltai
    Period30.6.104.7.10

    Fingerprint

    Nickel
    Crystals
    Crystal growth from melt
    Thermal evaporation
    Spectroscopic ellipsometry
    Polishing
    Refractive index

    Keywords

    • Extinction coefficient
    • Nickel
    • Refractive index
    • Spectroscopic ellipsometry
    • Surface structure

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering

    Cite this

    Atuchin, V. V., Grigorieva, T. I., Kruchinin, V. N., Lychagin, D. V., & Pokrovsky, L. D. (2010). Dispersive optical parameters of evaporated nickel films. In 2010 11th Annual International Conference and Seminar on Micro/Nanotechnologies and Electron Devices, EDM'2010 - Proceedings (pp. 37-39). [5568677] https://doi.org/10.1109/EDM.2010.5568677

    Dispersive optical parameters of evaporated nickel films. / Atuchin, Victor V.; Grigorieva, Tatiana I.; Kruchinin, Vladimir N.; Lychagin, Dmitry V.; Pokrovsky, Lev D.

    2010 11th Annual International Conference and Seminar on Micro/Nanotechnologies and Electron Devices, EDM'2010 - Proceedings. 2010. p. 37-39 5568677.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Atuchin, VV, Grigorieva, TI, Kruchinin, VN, Lychagin, DV & Pokrovsky, LD 2010, Dispersive optical parameters of evaporated nickel films. in 2010 11th Annual International Conference and Seminar on Micro/Nanotechnologies and Electron Devices, EDM'2010 - Proceedings., 5568677, pp. 37-39, 2010 11th Annual International Conference and Seminar on Micro/Nanotechnologies and Electron Devices, EDM'2010, Altai, Russian Federation, 30.6.10. https://doi.org/10.1109/EDM.2010.5568677
    Atuchin VV, Grigorieva TI, Kruchinin VN, Lychagin DV, Pokrovsky LD. Dispersive optical parameters of evaporated nickel films. In 2010 11th Annual International Conference and Seminar on Micro/Nanotechnologies and Electron Devices, EDM'2010 - Proceedings. 2010. p. 37-39. 5568677 https://doi.org/10.1109/EDM.2010.5568677
    Atuchin, Victor V. ; Grigorieva, Tatiana I. ; Kruchinin, Vladimir N. ; Lychagin, Dmitry V. ; Pokrovsky, Lev D. / Dispersive optical parameters of evaporated nickel films. 2010 11th Annual International Conference and Seminar on Micro/Nanotechnologies and Electron Devices, EDM'2010 - Proceedings. 2010. pp. 37-39
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