Dispersive optical parameters of evaporated nickel films

Victor V. Atuchin, Tatiana I. Grigorieva, Vladimir N. Kruchinin, Dmitry V. Lychagin, Lev D. Pokrovsky

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    Dispersion of refractive index and extinction coefficient of nickel film and nickel crystal surface (100) has been determined with spectroscopic ellipsometry over spectral range λ ∼ 250-1030 nm. Nickel film has been prepared by thermal evaporation method. Nickel crystal has been grown by horizontal Bridgman method. The crystal surface (100) at a first stage was mechanically polished and then treated by electro-polishing to remove the damage layer.

    Original languageEnglish
    Title of host publication2010 11th Annual International Conference and Seminar on Micro/Nanotechnologies and Electron Devices, EDM'2010 - Proceedings
    Pages37-39
    Number of pages3
    DOIs
    Publication statusPublished - 2010
    Event2010 11th Annual International Conference and Seminar on Micro/Nanotechnologies and Electron Devices, EDM'2010 - Altai, Russian Federation
    Duration: 30 Jun 20104 Jul 2010

    Other

    Other2010 11th Annual International Conference and Seminar on Micro/Nanotechnologies and Electron Devices, EDM'2010
    CountryRussian Federation
    CityAltai
    Period30.6.104.7.10

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    Keywords

    • Extinction coefficient
    • Nickel
    • Refractive index
    • Spectroscopic ellipsometry
    • Surface structure

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering

    Cite this

    Atuchin, V. V., Grigorieva, T. I., Kruchinin, V. N., Lychagin, D. V., & Pokrovsky, L. D. (2010). Dispersive optical parameters of evaporated nickel films. In 2010 11th Annual International Conference and Seminar on Micro/Nanotechnologies and Electron Devices, EDM'2010 - Proceedings (pp. 37-39). [5568677] https://doi.org/10.1109/EDM.2010.5568677