Dislocation structure in near-surface layers of pure metals formed by ion implantation

A. N. Didenko, Alexander Ilyich Ryabchikov, G. P. Isaev, N. M. Arzubov, Yu P. Sharkeev, E. V. Kozlov, G. V. Pushkareva, I. V. Nikonova, A. E. Ligachev

Research output: Contribution to journalArticle

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Abstract

Layer-by-layer investigation of the dislocation structure in near-surface layers of pure metals affected by high-dose ion implantation (D = 1 × 1016- 1 × 1018 ions cm-2, V = 40 kV, 1.2 MV) was carried out using electron microscopy. It was established that implantation of different ions in copper and α-Fe resulted in the formation of a developed dislocation structure in the near-surface layer, the thickness of which exceeded the ion range by several orders of magnitude. The dependences of dislocation density and dislocation loop concentration have been plotted vs. the distance to the irradiated surface.

Original languageEnglish
Pages (from-to)337-341
Number of pages5
JournalMaterials Science and Engineering A
Volume115
Issue numberC
DOIs
Publication statusPublished - 1 Aug 1989

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Ion implantation
ion implantation
surface layers
Metals
Ions
metals
Electron microscopy
ions
Copper
implantation
electron microscopy
copper
dosage

ASJC Scopus subject areas

  • Materials Science(all)
  • Engineering(all)

Cite this

Dislocation structure in near-surface layers of pure metals formed by ion implantation. / Didenko, A. N.; Ryabchikov, Alexander Ilyich; Isaev, G. P.; Arzubov, N. M.; Sharkeev, Yu P.; Kozlov, E. V.; Pushkareva, G. V.; Nikonova, I. V.; Ligachev, A. E.

In: Materials Science and Engineering A, Vol. 115, No. C, 01.08.1989, p. 337-341.

Research output: Contribution to journalArticle

Didenko, AN, Ryabchikov, AI, Isaev, GP, Arzubov, NM, Sharkeev, YP, Kozlov, EV, Pushkareva, GV, Nikonova, IV & Ligachev, AE 1989, 'Dislocation structure in near-surface layers of pure metals formed by ion implantation', Materials Science and Engineering A, vol. 115, no. C, pp. 337-341. https://doi.org/10.1016/0921-5093(89)90700-4
Didenko, A. N. ; Ryabchikov, Alexander Ilyich ; Isaev, G. P. ; Arzubov, N. M. ; Sharkeev, Yu P. ; Kozlov, E. V. ; Pushkareva, G. V. ; Nikonova, I. V. ; Ligachev, A. E. / Dislocation structure in near-surface layers of pure metals formed by ion implantation. In: Materials Science and Engineering A. 1989 ; Vol. 115, No. C. pp. 337-341.
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AU - Sharkeev, Yu P.

AU - Kozlov, E. V.

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