TY - JOUR
T1 - Diamond film synthesis in high-alternating-current glow discharge
AU - Linnik, S. A.
AU - Gaidaichuk, A. V.
PY - 2012/3
Y1 - 2012/3
N2 - Results of experiments with the deposition of polycrystalline diamond films onto silicon, titanium, and molybdenum substrates in a specially designed ac glow discharge system are presented. The phase composition and morphology of deposited films have been studied using the atomic force microscopy and X-ray diffraction techniques. It is established that the obtained diamond films possess high purity and degree of crystallinity. Inclusions of non-diamond carbon phases are absent. The rate of diamond film growth in the proposed system is 6-7 μm/h.
AB - Results of experiments with the deposition of polycrystalline diamond films onto silicon, titanium, and molybdenum substrates in a specially designed ac glow discharge system are presented. The phase composition and morphology of deposited films have been studied using the atomic force microscopy and X-ray diffraction techniques. It is established that the obtained diamond films possess high purity and degree of crystallinity. Inclusions of non-diamond carbon phases are absent. The rate of diamond film growth in the proposed system is 6-7 μm/h.
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U2 - 10.1134/S1063785012030273
DO - 10.1134/S1063785012030273
M3 - Article
AN - SCOPUS:84859854336
VL - 38
SP - 258
EP - 260
JO - Soviet Technical Physics Letters (English Translation of Pis'ma v Zhurnal Tekhnicheskoi Fiziki)
JF - Soviet Technical Physics Letters (English Translation of Pis'ma v Zhurnal Tekhnicheskoi Fiziki)
SN - 1063-7850
IS - 3
ER -