Diamond film synthesis in high-alternating-current glow discharge

Abstract

Results of experiments with the deposition of polycrystalline diamond films onto silicon, titanium, and molybdenum substrates in a specially designed ac glow discharge system are presented. The phase composition and morphology of deposited films have been studied using the atomic force microscopy and X-ray diffraction techniques. It is established that the obtained diamond films possess high purity and degree of crystallinity. Inclusions of non-diamond carbon phases are absent. The rate of diamond film growth in the proposed system is 6-7 μm/h.

Original language	English
Pages (from-to)	258-260
Number of pages	3
Journal	Technical Physics Letters
Volume	38
Issue number	3
DOIs	https://doi.org/10.1134/S1063785012030273
Publication status	Published - Mar 2012

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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Linnik, S. A., & Gaidaichuk, A. V. (2012). Diamond film synthesis in high-alternating-current glow discharge. Technical Physics Letters, 38(3), 258-260. https://doi.org/10.1134/S1063785012030273

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