Diamond film synthesis in high-alternating-current glow discharge

Abstract

Results of experiments with the deposition of polycrystalline diamond films onto silicon, titanium, and molybdenum substrates in a specially designed ac glow discharge system are presented. The phase composition and morphology of deposited films have been studied using the atomic force microscopy and X-ray diffraction techniques. It is established that the obtained diamond films possess high purity and degree of crystallinity. Inclusions of non-diamond carbon phases are absent. The rate of diamond film growth in the proposed system is 6-7 μm/h.

Original language	English
Pages (from-to)	258-260
Number of pages	3
Journal	Technical Physics Letters
Volume	38
Issue number	3
DOIs	https://doi.org/10.1134/S1063785012030273
Publication status	Published - Mar 2012

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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title = "Diamond film synthesis in high-alternating-current glow discharge",

abstract = "Results of experiments with the deposition of polycrystalline diamond films onto silicon, titanium, and molybdenum substrates in a specially designed ac glow discharge system are presented. The phase composition and morphology of deposited films have been studied using the atomic force microscopy and X-ray diffraction techniques. It is established that the obtained diamond films possess high purity and degree of crystallinity. Inclusions of non-diamond carbon phases are absent. The rate of diamond film growth in the proposed system is 6-7 μm/h.",

author = "Linnik, {S. A.} and Gaidaichuk, {A. V.}",

year = "2012",

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doi = "10.1134/S1063785012030273",

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volume = "38",

pages = "258--260",

journal = "Technical Physics Letters",

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AB - Results of experiments with the deposition of polycrystalline diamond films onto silicon, titanium, and molybdenum substrates in a specially designed ac glow discharge system are presented. The phase composition and morphology of deposited films have been studied using the atomic force microscopy and X-ray diffraction techniques. It is established that the obtained diamond films possess high purity and degree of crystallinity. Inclusions of non-diamond carbon phases are absent. The rate of diamond film growth in the proposed system is 6-7 μm/h.

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