Diamond film synthesis in high-alternating-current glow discharge

S. A. Linnik, A. V. Gaidaichuk

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

Results of experiments with the deposition of polycrystalline diamond films onto silicon, titanium, and molybdenum substrates in a specially designed ac glow discharge system are presented. The phase composition and morphology of deposited films have been studied using the atomic force microscopy and X-ray diffraction techniques. It is established that the obtained diamond films possess high purity and degree of crystallinity. Inclusions of non-diamond carbon phases are absent. The rate of diamond film growth in the proposed system is 6-7 μm/h.

Original languageEnglish
Pages (from-to)258-260
Number of pages3
JournalTechnical Physics Letters
Volume38
Issue number3
DOIs
Publication statusPublished - Mar 2012

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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