Abstract
Results of experiments with the deposition of polycrystalline diamond films onto silicon, titanium, and molybdenum substrates in a specially designed ac glow discharge system are presented. The phase composition and morphology of deposited films have been studied using the atomic force microscopy and X-ray diffraction techniques. It is established that the obtained diamond films possess high purity and degree of crystallinity. Inclusions of non-diamond carbon phases are absent. The rate of diamond film growth in the proposed system is 6-7 μm/h.
| Original language | English |
|---|---|
| Pages (from-to) | 258-260 |
| Number of pages | 3 |
| Journal | Technical Physics Letters |
| Volume | 38 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - Mar 2012 |
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ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
Cite this
Diamond film synthesis in high-alternating-current glow discharge. / Linnik, S. A.; Gaidaichuk, A. V.
In: Technical Physics Letters, Vol. 38, No. 3, 03.2012, p. 258-260.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Diamond film synthesis in high-alternating-current glow discharge
AU - Linnik, S. A.
AU - Gaidaichuk, A. V.
PY - 2012/3
Y1 - 2012/3
N2 - Results of experiments with the deposition of polycrystalline diamond films onto silicon, titanium, and molybdenum substrates in a specially designed ac glow discharge system are presented. The phase composition and morphology of deposited films have been studied using the atomic force microscopy and X-ray diffraction techniques. It is established that the obtained diamond films possess high purity and degree of crystallinity. Inclusions of non-diamond carbon phases are absent. The rate of diamond film growth in the proposed system is 6-7 μm/h.
AB - Results of experiments with the deposition of polycrystalline diamond films onto silicon, titanium, and molybdenum substrates in a specially designed ac glow discharge system are presented. The phase composition and morphology of deposited films have been studied using the atomic force microscopy and X-ray diffraction techniques. It is established that the obtained diamond films possess high purity and degree of crystallinity. Inclusions of non-diamond carbon phases are absent. The rate of diamond film growth in the proposed system is 6-7 μm/h.
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UR - http://www.scopus.com/inward/citedby.url?scp=84859854336&partnerID=8YFLogxK
U2 - 10.1134/S1063785012030273
DO - 10.1134/S1063785012030273
M3 - Article
VL - 38
SP - 258
EP - 260
JO - Technical Physics Letters
JF - Technical Physics Letters
SN - 1063-7850
IS - 3
ER -