Development of solid surface modification technologies on the base of magnetron plasma sources in Nuclear Physics Institute of Tomsk Polytechnic University

P. Ananin, O. Asainov, G. Bleikher, S. Zubarev, L. Kositsyn, V. Krivibokov, O. Kuzmin, V. Legostaev, A. Padusenko, O. Paschenko, D. Rychkov, S. Yanin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Research was carried out aiming at development of technologies and industrial scale equipment for processing of large area sheet materials using magnetron sputtering systems (MSS). The properties of MSS with cylindrical and planar diodes, and with cathodes made from various materials, were investigated. The problems of their calculation and design, volt-ampere characteristics, emissive properties, and role of gas medium, were studied. Magnetic field parameter optimization, heat injection and thermal protection of cathodes, spatial heterogeneity of particle flow, were analyzed. Studies of deposited coating properties were carried out in parallel: rate of deposition, adhesion to substrate, optical characteristics. Optimal deposition modes for formation of technical and household mirrors, colored sheet glasses, preparation of metal, oxide, nitride and oxide-nitride coatings, were found. Multilayer optical deposition technology was worked out. In particular, hard heat preserving coatings were obtained. They are transparent in the visible optical range and reflect up to 90% in the infrared. On the basis of these results, some variants of industrial scale technologies and MSS plants were developed and manufactured.

Original languageEnglish
Title of host publicationProceedings - KORUS 2000: 4th Korea-Russia International Symposium on Science and Technology
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages215-219
Number of pages5
Volume3
ISBN (Print)0780364864, 9780780364868
DOIs
Publication statusPublished - 2000
Event4th Korea-Russia International Symposium on Science and Technology, KORUS 2000 - Ulsan, Korea, Republic of
Duration: 27 Jun 20001 Jul 2000

Other

Other4th Korea-Russia International Symposium on Science and Technology, KORUS 2000
CountryKorea, Republic of
CityUlsan
Period27.6.001.7.00

Keywords

  • magnetron sputtering system
  • optical coverings
  • thin film deposition

ASJC Scopus subject areas

  • Clinical Biochemistry
  • Computer Networks and Communications
  • Biotechnology
  • Civil and Structural Engineering
  • Mechanics of Materials
  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Surfaces, Coatings and Films

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