Determination of thickness uniformity of nickel coatings deposited on zirconium alloy by magnetron sputtering

Jingwen Qiao, Anna Bezmaternykh, Dmitry Sednev

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this paper, the results of measurements of nickel coating thickness are presented. Ni coatings were deposited onto zirconium alloy Zr-1Nb and Si wafers by dc magnetron sputtering. The thickness of Ni coatings was measured by scanning electron microscopy (SEM), ball abrasion method and non-destructive X-ray diffraction (XRD) method. The developed technique of determination of coating uniformity by grazing incidence XRD method was shown. The estimation of uniformity of Ni coatings with a thickness from 0.5 to 2 μm was performed. The distribution map of the coating thickness over surface of 20×20 mm was constructed. The deposited coating with higher thickness of 2 μm has 10% deviation of thickness.

Original languageEnglish
Title of host publicationProspects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists
PublisherAmerican Institute of Physics Inc.
Volume1899
ISBN (Electronic)9780735415874
DOIs
Publication statusPublished - 3 Nov 2017
Event14th International Conference of Students and Young Scientists on Prospects of Fundamental Sciences Development, PFSD 2017 - Tomsk, Russian Federation
Duration: 25 Apr 201728 Apr 2017

Conference

Conference14th International Conference of Students and Young Scientists on Prospects of Fundamental Sciences Development, PFSD 2017
CountryRussian Federation
CityTomsk
Period25.4.1728.4.17

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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