Abstract
In this paper, the results of measurements of nickel coating thickness are presented. Ni coatings were deposited onto zirconium alloy Zr-1Nb and Si wafers by dc magnetron sputtering. The thickness of Ni coatings was measured by scanning electron microscopy (SEM), ball abrasion method and non-destructive X-ray diffraction (XRD) method. The developed technique of determination of coating uniformity by grazing incidence XRD method was shown. The estimation of uniformity of Ni coatings with a thickness from 0.5 to 2 μm was performed. The distribution map of the coating thickness over surface of 20×20 mm was constructed. The deposited coating with higher thickness of 2 μm has 10% deviation of thickness.
Original language | English |
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Title of host publication | Prospects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists |
Publisher | American Institute of Physics Inc. |
Volume | 1899 |
ISBN (Electronic) | 9780735415874 |
DOIs | |
Publication status | Published - 3 Nov 2017 |
Event | 14th International Conference of Students and Young Scientists on Prospects of Fundamental Sciences Development, PFSD 2017 - Tomsk, Russian Federation Duration: 25 Apr 2017 → 28 Apr 2017 |
Conference
Conference | 14th International Conference of Students and Young Scientists on Prospects of Fundamental Sciences Development, PFSD 2017 |
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Country | Russian Federation |
City | Tomsk |
Period | 25.4.17 → 28.4.17 |
ASJC Scopus subject areas
- Physics and Astronomy(all)