Determination of thickness uniformity of nickel coatings deposited on zirconium alloy by magnetron sputtering

Abstract

In this paper, the results of measurements of nickel coating thickness are presented. Ni coatings were deposited onto zirconium alloy Zr-1Nb and Si wafers by dc magnetron sputtering. The thickness of Ni coatings was measured by scanning electron microscopy (SEM), ball abrasion method and non-destructive X-ray diffraction (XRD) method. The developed technique of determination of coating uniformity by grazing incidence XRD method was shown. The estimation of uniformity of Ni coatings with a thickness from 0.5 to 2 μm was performed. The distribution map of the coating thickness over surface of 20×20 mm was constructed. The deposited coating with higher thickness of 2 μm has 10% deviation of thickness.

Original language	English
Title of host publication	Prospects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists
Publisher	American Institute of Physics Inc.
Volume	1899
ISBN (Electronic)	9780735415874
DOIs	https://doi.org/10.1063/1.5009863
Publication status	Published - 3 Nov 2017
Event	14th International Conference of Students and Young Scientists on Prospects of Fundamental Sciences Development, PFSD 2017 - Tomsk, Russian Federation Duration: 25 Apr 2017 → 28 Apr 2017

Conference

Conference	14th International Conference of Students and Young Scientists on Prospects of Fundamental Sciences Development, PFSD 2017
Country	Russian Federation
City	Tomsk
Period	25.4.17 → 28.4.17

ASJC Scopus subject areas

Physics and Astronomy(all)

Access to Document

10.1063/1.5009863

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Qiao, J., Bezmaternykh, A., & Sednev, D. (2017). Determination of thickness uniformity of nickel coatings deposited on zirconium alloy by magnetron sputtering. In Prospects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists (Vol. 1899). [040008] American Institute of Physics Inc.. https://doi.org/10.1063/1.5009863

Determination of thickness uniformity of nickel coatings deposited on zirconium alloy by magnetron sputtering. / Qiao, Jingwen; Bezmaternykh, Anna; Sednev, Dmitry.

Prospects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists. Vol. 1899 American Institute of Physics Inc., 2017. 040008.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Qiao, J, Bezmaternykh, A & Sednev, D 2017, Determination of thickness uniformity of nickel coatings deposited on zirconium alloy by magnetron sputtering. in Prospects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists. vol. 1899, 040008, American Institute of Physics Inc., 14th International Conference of Students and Young Scientists on Prospects of Fundamental Sciences Development, PFSD 2017, Tomsk, Russian Federation, 25.4.17. https://doi.org/10.1063/1.5009863

Qiao J, Bezmaternykh A, Sednev D. Determination of thickness uniformity of nickel coatings deposited on zirconium alloy by magnetron sputtering. In Prospects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists. Vol. 1899. American Institute of Physics Inc. 2017. 040008 https://doi.org/10.1063/1.5009863

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abstract = "In this paper, the results of measurements of nickel coating thickness are presented. Ni coatings were deposited onto zirconium alloy Zr-1Nb and Si wafers by dc magnetron sputtering. The thickness of Ni coatings was measured by scanning electron microscopy (SEM), ball abrasion method and non-destructive X-ray diffraction (XRD) method. The developed technique of determination of coating uniformity by grazing incidence XRD method was shown. The estimation of uniformity of Ni coatings with a thickness from 0.5 to 2 μm was performed. The distribution map of the coating thickness over surface of 20×20 mm was constructed. The deposited coating with higher thickness of 2 μm has 10% deviation of thickness.",

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N2 - In this paper, the results of measurements of nickel coating thickness are presented. Ni coatings were deposited onto zirconium alloy Zr-1Nb and Si wafers by dc magnetron sputtering. The thickness of Ni coatings was measured by scanning electron microscopy (SEM), ball abrasion method and non-destructive X-ray diffraction (XRD) method. The developed technique of determination of coating uniformity by grazing incidence XRD method was shown. The estimation of uniformity of Ni coatings with a thickness from 0.5 to 2 μm was performed. The distribution map of the coating thickness over surface of 20×20 mm was constructed. The deposited coating with higher thickness of 2 μm has 10% deviation of thickness.

AB - In this paper, the results of measurements of nickel coating thickness are presented. Ni coatings were deposited onto zirconium alloy Zr-1Nb and Si wafers by dc magnetron sputtering. The thickness of Ni coatings was measured by scanning electron microscopy (SEM), ball abrasion method and non-destructive X-ray diffraction (XRD) method. The developed technique of determination of coating uniformity by grazing incidence XRD method was shown. The estimation of uniformity of Ni coatings with a thickness from 0.5 to 2 μm was performed. The distribution map of the coating thickness over surface of 20×20 mm was constructed. The deposited coating with higher thickness of 2 μm has 10% deviation of thickness.

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