Abstract
In this paper, the results of measurements of nickel coating thickness are presented. Ni coatings were deposited onto zirconium alloy Zr-1Nb and Si wafers by dc magnetron sputtering. The thickness of Ni coatings was measured by scanning electron microscopy (SEM), ball abrasion method and non-destructive X-ray diffraction (XRD) method. The developed technique of determination of coating uniformity by grazing incidence XRD method was shown. The estimation of uniformity of Ni coatings with a thickness from 0.5 to 2 μm was performed. The distribution map of the coating thickness over surface of 20×20 mm was constructed. The deposited coating with higher thickness of 2 μm has 10% deviation of thickness.
| Original language | English |
|---|---|
| Title of host publication | Prospects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists |
| Publisher | American Institute of Physics Inc. |
| Volume | 1899 |
| ISBN (Electronic) | 9780735415874 |
| DOIs | |
| Publication status | Published - 3 Nov 2017 |
| Event | 14th International Conference of Students and Young Scientists on Prospects of Fundamental Sciences Development, PFSD 2017 - Tomsk, Russian Federation Duration: 25 Apr 2017 → 28 Apr 2017 |
Conference
| Conference | 14th International Conference of Students and Young Scientists on Prospects of Fundamental Sciences Development, PFSD 2017 |
|---|---|
| Country | Russian Federation |
| City | Tomsk |
| Period | 25.4.17 → 28.4.17 |
Fingerprint
ASJC Scopus subject areas
- Physics and Astronomy(all)
Cite this
Determination of thickness uniformity of nickel coatings deposited on zirconium alloy by magnetron sputtering. / Qiao, Jingwen; Bezmaternykh, Anna; Sednev, Dmitry.
Prospects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists. Vol. 1899 American Institute of Physics Inc., 2017. 040008.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Determination of thickness uniformity of nickel coatings deposited on zirconium alloy by magnetron sputtering
AU - Qiao, Jingwen
AU - Bezmaternykh, Anna
AU - Sednev, Dmitry
PY - 2017/11/3
Y1 - 2017/11/3
N2 - In this paper, the results of measurements of nickel coating thickness are presented. Ni coatings were deposited onto zirconium alloy Zr-1Nb and Si wafers by dc magnetron sputtering. The thickness of Ni coatings was measured by scanning electron microscopy (SEM), ball abrasion method and non-destructive X-ray diffraction (XRD) method. The developed technique of determination of coating uniformity by grazing incidence XRD method was shown. The estimation of uniformity of Ni coatings with a thickness from 0.5 to 2 μm was performed. The distribution map of the coating thickness over surface of 20×20 mm was constructed. The deposited coating with higher thickness of 2 μm has 10% deviation of thickness.
AB - In this paper, the results of measurements of nickel coating thickness are presented. Ni coatings were deposited onto zirconium alloy Zr-1Nb and Si wafers by dc magnetron sputtering. The thickness of Ni coatings was measured by scanning electron microscopy (SEM), ball abrasion method and non-destructive X-ray diffraction (XRD) method. The developed technique of determination of coating uniformity by grazing incidence XRD method was shown. The estimation of uniformity of Ni coatings with a thickness from 0.5 to 2 μm was performed. The distribution map of the coating thickness over surface of 20×20 mm was constructed. The deposited coating with higher thickness of 2 μm has 10% deviation of thickness.
UR - http://www.scopus.com/inward/record.url?scp=85034257079&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85034257079&partnerID=8YFLogxK
U2 - 10.1063/1.5009863
DO - 10.1063/1.5009863
M3 - Conference contribution
AN - SCOPUS:85034257079
VL - 1899
BT - Prospects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists
PB - American Institute of Physics Inc.
ER -