Determination of thickness uniformity of nickel coatings deposited on zirconium alloy by magnetron sputtering

Jingwen Qiao, Anna Bezmaternykh, Dmitry Sednev

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, the results of measurements of nickel coating thickness are presented. Ni coatings were deposited onto zirconium alloy Zr-1Nb and Si wafers by dc magnetron sputtering. The thickness of Ni coatings was measured by scanning electron microscopy (SEM), ball abrasion method and non-destructive X-ray diffraction (XRD) method. The developed technique of determination of coating uniformity by grazing incidence XRD method was shown. The estimation of uniformity of Ni coatings with a thickness from 0.5 to 2 μm was performed. The distribution map of the coating thickness over surface of 20×20 mm was constructed. The deposited coating with higher thickness of 2 μm has 10% deviation of thickness.

Original languageEnglish
Title of host publicationProspects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists
PublisherAmerican Institute of Physics Inc.
Volume1899
ISBN (Electronic)9780735415874
DOIs
Publication statusPublished - 3 Nov 2017
Event14th International Conference of Students and Young Scientists on Prospects of Fundamental Sciences Development, PFSD 2017 - Tomsk, Russian Federation
Duration: 25 Apr 201728 Apr 2017

Conference

Conference14th International Conference of Students and Young Scientists on Prospects of Fundamental Sciences Development, PFSD 2017
CountryRussian Federation
CityTomsk
Period25.4.1728.4.17

Fingerprint

nickel coatings
zirconium alloys
magnetron sputtering
coatings
abrasion
grazing incidence
diffraction
balls
x rays
wafers
deviation
scanning electron microscopy

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Qiao, J., Bezmaternykh, A., & Sednev, D. (2017). Determination of thickness uniformity of nickel coatings deposited on zirconium alloy by magnetron sputtering. In Prospects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists (Vol. 1899). [040008] American Institute of Physics Inc.. https://doi.org/10.1063/1.5009863

Determination of thickness uniformity of nickel coatings deposited on zirconium alloy by magnetron sputtering. / Qiao, Jingwen; Bezmaternykh, Anna; Sednev, Dmitry.

Prospects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists. Vol. 1899 American Institute of Physics Inc., 2017. 040008.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Qiao, J, Bezmaternykh, A & Sednev, D 2017, Determination of thickness uniformity of nickel coatings deposited on zirconium alloy by magnetron sputtering. in Prospects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists. vol. 1899, 040008, American Institute of Physics Inc., 14th International Conference of Students and Young Scientists on Prospects of Fundamental Sciences Development, PFSD 2017, Tomsk, Russian Federation, 25.4.17. https://doi.org/10.1063/1.5009863
Qiao J, Bezmaternykh A, Sednev D. Determination of thickness uniformity of nickel coatings deposited on zirconium alloy by magnetron sputtering. In Prospects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists. Vol. 1899. American Institute of Physics Inc. 2017. 040008 https://doi.org/10.1063/1.5009863
Qiao, Jingwen ; Bezmaternykh, Anna ; Sednev, Dmitry. / Determination of thickness uniformity of nickel coatings deposited on zirconium alloy by magnetron sputtering. Prospects of Fundamental Sciences Development, PFSD 2017 - Proceedings of the XIV International Conference of Students and Young Scientists. Vol. 1899 American Institute of Physics Inc., 2017.
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