Determination of the Electron Density and Electron Temperature in A Magnetron Discharge Plasma Using Optical Spectroscopy and the Collisional-Radiative Model of Argon

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Abstract

A method for determining the electron temperature and electron density in a plasma is proposed that is based on minimization of the difference between the experimental relative intensities of the spectral argon (Ar) lines and those same intensities calculated with the aid of the collisional-radiative model. The model describes the kinetics of the ground state and 40 excited states of the Ar atom and takes into account the following processes: excitation and deactivation of the states of the atom by electron impact, radiative decay of the excited states, self-absorption of radiation, ionization of excited states by electron impact, and quenching of metastable states as a consequence of collisions with the chamber walls. Using the given method, we have investigated the plasma of a magnetron discharge on a laboratory setup for intermediate-frequency magnetron sputtering for a few selected operating regimes.

Original languageEnglish
Pages (from-to)765-775
Number of pages11
JournalRussian Physics Journal
Volume60
Issue number5
DOIs
Publication statusPublished - 1 Sep 2017

Fingerprint

plasma jets
argon
electron energy
spectroscopy
electron impact
excitation
intermediate frequencies
temperature
self absorption
metastable state
deactivation
atoms
magnetron sputtering
chambers
quenching
ionization
optimization
collisions
ground state
kinetics

Keywords

  • collisional-radiative model
  • optical spectroscopy
  • plasma diagnostics
  • reactive magnetron sputtering

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

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title = "Determination of the Electron Density and Electron Temperature in A Magnetron Discharge Plasma Using Optical Spectroscopy and the Collisional-Radiative Model of Argon",
abstract = "A method for determining the electron temperature and electron density in a plasma is proposed that is based on minimization of the difference between the experimental relative intensities of the spectral argon (Ar) lines and those same intensities calculated with the aid of the collisional-radiative model. The model describes the kinetics of the ground state and 40 excited states of the Ar atom and takes into account the following processes: excitation and deactivation of the states of the atom by electron impact, radiative decay of the excited states, self-absorption of radiation, ionization of excited states by electron impact, and quenching of metastable states as a consequence of collisions with the chamber walls. Using the given method, we have investigated the plasma of a magnetron discharge on a laboratory setup for intermediate-frequency magnetron sputtering for a few selected operating regimes.",
keywords = "collisional-radiative model, optical spectroscopy, plasma diagnostics, reactive magnetron sputtering",
author = "Evdokimov, {K. E.} and Konishchev, {M. E.} and Pichugin, {V. F.} and Pustovalova, {A. A.} and Ivanova, {N. M.} and Ch Sun’",
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T1 - Determination of the Electron Density and Electron Temperature in A Magnetron Discharge Plasma Using Optical Spectroscopy and the Collisional-Radiative Model of Argon

AU - Evdokimov, K. E.

AU - Konishchev, M. E.

AU - Pichugin, V. F.

AU - Pustovalova, A. A.

AU - Ivanova, N. M.

AU - Sun’, Ch

PY - 2017/9/1

Y1 - 2017/9/1

N2 - A method for determining the electron temperature and electron density in a plasma is proposed that is based on minimization of the difference between the experimental relative intensities of the spectral argon (Ar) lines and those same intensities calculated with the aid of the collisional-radiative model. The model describes the kinetics of the ground state and 40 excited states of the Ar atom and takes into account the following processes: excitation and deactivation of the states of the atom by electron impact, radiative decay of the excited states, self-absorption of radiation, ionization of excited states by electron impact, and quenching of metastable states as a consequence of collisions with the chamber walls. Using the given method, we have investigated the plasma of a magnetron discharge on a laboratory setup for intermediate-frequency magnetron sputtering for a few selected operating regimes.

AB - A method for determining the electron temperature and electron density in a plasma is proposed that is based on minimization of the difference between the experimental relative intensities of the spectral argon (Ar) lines and those same intensities calculated with the aid of the collisional-radiative model. The model describes the kinetics of the ground state and 40 excited states of the Ar atom and takes into account the following processes: excitation and deactivation of the states of the atom by electron impact, radiative decay of the excited states, self-absorption of radiation, ionization of excited states by electron impact, and quenching of metastable states as a consequence of collisions with the chamber walls. Using the given method, we have investigated the plasma of a magnetron discharge on a laboratory setup for intermediate-frequency magnetron sputtering for a few selected operating regimes.

KW - collisional-radiative model

KW - optical spectroscopy

KW - plasma diagnostics

KW - reactive magnetron sputtering

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