TY - GEN
T1 - Deposition of the silicon films from plasma ablation formed by a high power ion beam
AU - Remnev, Gennady E.
AU - Kholodnaya, Galina E.
AU - Sazonov, Roman V.
AU - Ponomarev, Denis Vladimirovich
PY - 2015/1/16
Y1 - 2015/1/16
UR - http://www.scopus.com/inward/record.url?scp=84923064055&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84923064055&partnerID=8YFLogxK
U2 - 10.1109/PLASMA.2014.7012575
DO - 10.1109/PLASMA.2014.7012575
M3 - Conference contribution
AN - SCOPUS:84923064055
SN - 9781479927111
BT - ICOPS/BEAMS 2014 - 41st IEEE International Conference on Plasma Science and the 20th International Conference on High-Power Particle Beams
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 41st IEEE International Conference on Plasma Science, ICOPS 2014 and the 20th IEEE International Conference on High-Power Particle Beams, BEAMS 2014
Y2 - 25 May 2014 through 29 May 2014
ER -