Deposition of silicon–carbon coatings from the plasma of a non-self-sustained arc discharge with a heated cathode

A. S. Grenadyorov, K. V. Oskomov, A. A. Solov’ev, S. V. Rabotkin

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Amorphous hydrogenated carbon doped with silicon oxide (a-C:H:Si:O), which is referred to as silicon–carbon coatings in this work, consists of thin amorphous films, which are used as commercial solid lubricants due to their higher stability under extreme environmental conditions as compared to amorphous hydrogenated carbon. The deposition of silicon–carbon coatings from the plasma of a non-self-sustained arc discharge with a heated cathode is considered. Silicon–carbon coatings are deposited using polyphenul methylsiloxane as a precursor at a flow rate of 0.05 mL/min in an argon atmosphere at a pressure of 0.1 Pa. A high-frequency power supply is used to apply a high-frequency bias voltage to a substrate during deposition. After deposition, the mechanical properties of the coatings are studied. The maximum hardness of the coating is 20 GPa at a minimum friction coefficient of 0.16 and a wear rate of 1.3 × 10–5 mm3 N–1 m–1. Energy dispersive analysis shows that the coatings contain a significant content of carbon and oxygen (about 80 and 15%, respectively) and a low content of silicon (about 5%).

Original languageEnglish
Pages (from-to)690-695
Number of pages6
JournalTechnical Physics
Volume61
Issue number5
DOIs
Publication statusPublished - 1 May 2016

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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