Deposition of Polycrystalline Diamond Films with a Controlled Grain Size by Periodic Secondary Nucleation

S. A. Linnik, A. V. Gaydaychuk, E. Y. Baryshnikov

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

This paper presents a new method for the synthesis of polycrystalline diamond films with a controlled grain size, based on the principle of creating a multilayer coating structure by periodic bias-induced secondary nucleation. By this technique, we synthesized diamond films with a thickness of up to 120 μm and a grain size of up to 1 μm. The diamond multilayer films obtained were characterized by scanning electron microscopy (SEM), Raman spectroscopy, and X-ray diffraction (XRD). The effect of different deposition parameters on nucleation density was also discussed. This method shows considerable promise for the synthesis of thick diamond coatings with low roughness and internal stress.

Original languageEnglish
Pages (from-to)S138-S144
JournalMaterials Today: Proceedings
Volume3
DOIs
Publication statusPublished - 1 Jan 2016

Keywords

  • Diamond films
  • Ion bombardment
  • Multilayer structure
  • Secondary nucleation

ASJC Scopus subject areas

  • Materials Science(all)

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