Deposition of diamond-like carbon films from the magnetron discharge plasma

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper concerns with the problem of obtaining the diamond-like carbon (DLC) films. DLC films have high hardness, low friction coefficient, low electrical conductivity, chemical inertness, high thermal conductivity and other valuable properties. Due to these properties DLC films are used as protective, dielectric, antireflecting, antifriction and biocompatible coatings. The most popular methods for DLC film production are vacuum arc evaporation and pulsed laser ablation. However, using these methods presents some difficulties. The main disadvantage of the coatings' deposition from the arc discharge plasma is drop fraction which degrades the quality of the obtained coatings. The disadvantage of the pulsed laser ablation is its technical complexity and difficulties in realization of the method. In this paper the magnetron sputtering is treated as an alternative method for producing the DLC films. The object of research is dual magnetron sputtering system (DMSS), which has advantages over planar magnetron system. The research of different operation modes of the DMSS while sputtering the carbon target in the Ar environment and the analysis of the hardness, electrical resistance and phase structure of the obtained DLC films on polished stainless steel are reported.

Original languageEnglish
Title of host publicationProceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012
DOIs
Publication statusPublished - 1 Dec 2012
Event2012 7th International Forum on Strategic Technology, IFOST 2012 - Tomsk, Russian Federation
Duration: 18 Sep 201221 Sep 2012

Conference

Conference2012 7th International Forum on Strategic Technology, IFOST 2012
CountryRussian Federation
CityTomsk
Period18.9.1221.9.12

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Keywords

  • diamond-like carbon coatings
  • DLC
  • dual magnetron
  • electric resistance
  • hardness
  • magnetron sputtering
  • thin films

ASJC Scopus subject areas

  • Management of Technology and Innovation

Cite this

Yuryev, Y., Yuryeva, A., Korzhenko, D., & Stepanova, O. (2012). Deposition of diamond-like carbon films from the magnetron discharge plasma. In Proceedings - 2012 7th International Forum on Strategic Technology, IFOST 2012 [6357575] https://doi.org/10.1109/IFOST.2012.6357575