Degradation of nitride coatings in low-pressure gas discharge plasma

Yurii Ivanov, Vladimir Shugurov, Olga Krysina, Elizaveta Petrikova, Oleg Tolkachev

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The paper provides research data on the defect structure, mechanical characteristics, and tribological properties of commercially pure VT1-0 titanium exposed to surface modification on a COMPLEX laboratory electron-ion plasma setup which allows nitriding, coating deposition, and etching in low-pressure gas discharge plasma in a single vacuum cycle. It is shown that preliminary plasma nitriding forms a columnar Ti2N phase in VT1-0 titanium and that subsequent TiN deposition results in a thin nanocrystalline TiN layer. When the coating-substrate system is etched, the coating fails and the tribological properties of the material degrade greatly.

Original languageEnglish
Title of host publicationProceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017
PublisherAmerican Institute of Physics Inc.
Volume1909
ISBN (Electronic)9780735416017
DOIs
Publication statusPublished - 1 Dec 2017
EventInternational Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017 - Tomsk, Russian Federation
Duration: 9 Oct 201713 Oct 2017

Conference

ConferenceInternational Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017
CountryRussian Federation
CityTomsk
Period9.10.1713.10.17

Fingerprint

gas discharges
nitrides
low pressure
nitriding
degradation
coatings
titanium
coating
etching
vacuum
cycles
defects
ions
electrons

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Ivanov, Y., Shugurov, V., Krysina, O., Petrikova, E., & Tolkachev, O. (2017). Degradation of nitride coatings in low-pressure gas discharge plasma. In Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017 (Vol. 1909). [020074] American Institute of Physics Inc.. https://doi.org/10.1063/1.5013755

Degradation of nitride coatings in low-pressure gas discharge plasma. / Ivanov, Yurii; Shugurov, Vladimir; Krysina, Olga; Petrikova, Elizaveta; Tolkachev, Oleg.

Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017. Vol. 1909 American Institute of Physics Inc., 2017. 020074.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ivanov, Y, Shugurov, V, Krysina, O, Petrikova, E & Tolkachev, O 2017, Degradation of nitride coatings in low-pressure gas discharge plasma. in Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017. vol. 1909, 020074, American Institute of Physics Inc., International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017, Tomsk, Russian Federation, 9.10.17. https://doi.org/10.1063/1.5013755
Ivanov Y, Shugurov V, Krysina O, Petrikova E, Tolkachev O. Degradation of nitride coatings in low-pressure gas discharge plasma. In Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017. Vol. 1909. American Institute of Physics Inc. 2017. 020074 https://doi.org/10.1063/1.5013755
Ivanov, Yurii ; Shugurov, Vladimir ; Krysina, Olga ; Petrikova, Elizaveta ; Tolkachev, Oleg. / Degradation of nitride coatings in low-pressure gas discharge plasma. Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017. Vol. 1909 American Institute of Physics Inc., 2017.
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