Degradation of nitride coatings in low-pressure gas discharge plasma

Abstract

The paper provides research data on the defect structure, mechanical characteristics, and tribological properties of commercially pure VT1-0 titanium exposed to surface modification on a COMPLEX laboratory electron-ion plasma setup which allows nitriding, coating deposition, and etching in low-pressure gas discharge plasma in a single vacuum cycle. It is shown that preliminary plasma nitriding forms a columnar Ti₂N phase in VT1-0 titanium and that subsequent TiN deposition results in a thin nanocrystalline TiN layer. When the coating-substrate system is etched, the coating fails and the tribological properties of the material degrade greatly.

Original language	English
Title of host publication	Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017
Publisher	American Institute of Physics Inc.
Volume	1909
ISBN (Electronic)	9780735416017
DOIs	https://doi.org/10.1063/1.5013755
Publication status	Published - 1 Dec 2017
Event	International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017 - Tomsk, Russian Federation Duration: 9 Oct 2017 → 13 Oct 2017

Conference

Conference	International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017
Country	Russian Federation
City	Tomsk
Period	9.10.17 → 13.10.17

ASJC Scopus subject areas

Physics and Astronomy(all)

Access to Document

10.1063/1.5013755

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Cite this

Ivanov, Y., Shugurov, V., Krysina, O., Petrikova, E., & Tolkachev, O. (2017). Degradation of nitride coatings in low-pressure gas discharge plasma. In Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017 (Vol. 1909). [020074] American Institute of Physics Inc.. https://doi.org/10.1063/1.5013755

Degradation of nitride coatings in low-pressure gas discharge plasma. / Ivanov, Yurii; Shugurov, Vladimir; Krysina, Olga; Petrikova, Elizaveta; Tolkachev, Oleg.

Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017. Vol. 1909 American Institute of Physics Inc., 2017. 020074.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Ivanov, Y, Shugurov, V, Krysina, O, Petrikova, E & Tolkachev, O 2017, Degradation of nitride coatings in low-pressure gas discharge plasma. in Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017. vol. 1909, 020074, American Institute of Physics Inc., International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017, Tomsk, Russian Federation, 9.10.17. https://doi.org/10.1063/1.5013755

Ivanov Y, Shugurov V, Krysina O, Petrikova E, Tolkachev O. Degradation of nitride coatings in low-pressure gas discharge plasma. In Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017. Vol. 1909. American Institute of Physics Inc. 2017. 020074 https://doi.org/10.1063/1.5013755

Ivanov, Yurii ; Shugurov, Vladimir ; Krysina, Olga ; Petrikova, Elizaveta ; Tolkachev, Oleg. / Degradation of nitride coatings in low-pressure gas discharge plasma. Proceedings of the International Conference on Advanced Materials with Hierarchical Structure for New Technologies and Reliable Structures 2017, AMHS 2017. Vol. 1909 American Institute of Physics Inc., 2017.

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abstract = "The paper provides research data on the defect structure, mechanical characteristics, and tribological properties of commercially pure VT1-0 titanium exposed to surface modification on a COMPLEX laboratory electron-ion plasma setup which allows nitriding, coating deposition, and etching in low-pressure gas discharge plasma in a single vacuum cycle. It is shown that preliminary plasma nitriding forms a columnar Ti2N phase in VT1-0 titanium and that subsequent TiN deposition results in a thin nanocrystalline TiN layer. When the coating-substrate system is etched, the coating fails and the tribological properties of the material degrade greatly.",

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AB - The paper provides research data on the defect structure, mechanical characteristics, and tribological properties of commercially pure VT1-0 titanium exposed to surface modification on a COMPLEX laboratory electron-ion plasma setup which allows nitriding, coating deposition, and etching in low-pressure gas discharge plasma in a single vacuum cycle. It is shown that preliminary plasma nitriding forms a columnar Ti2N phase in VT1-0 titanium and that subsequent TiN deposition results in a thin nanocrystalline TiN layer. When the coating-substrate system is etched, the coating fails and the tribological properties of the material degrade greatly.

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