TY - JOUR
T1 - CuO films deposited by superimposed high power impulse and DC magnetron sputtering
AU - Semenov, V. A.
AU - Grenadyorov, A. S.
AU - Oskirko, V. O.
AU - Zakharov, A. N.
AU - Rabotkin, S. V.
AU - Ionov, I. V.
AU - Solovyev, A. A.
N1 - Funding Information:
This work was supported by RFBR (grant No. 18-32-00179).
Publisher Copyright:
© 2019 IOP Publishing Ltd. All rights reserved.
Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2019/11/28
Y1 - 2019/11/28
N2 - Copper oxide films have been successfully deposited onto glass, fused quartz and Si(100) substrates by superimposed high power impulse (HIPIMS) and DC reactive magnetron sputtering. The deposition rate, adhesion, structure, wettability and optical properties of the obtained films were compared with those of CuO films deposited by conventional DC sputtering. X-ray diffraction analysis revealed that nanocrystallite size, single phase cupric oxide thin films with monoclinic structure were formed in all deposition modes. However, superimposing the direct current during off-time of HiPIMS pulsing allowed formation of denser film with smooth surface and good optical properties.
AB - Copper oxide films have been successfully deposited onto glass, fused quartz and Si(100) substrates by superimposed high power impulse (HIPIMS) and DC reactive magnetron sputtering. The deposition rate, adhesion, structure, wettability and optical properties of the obtained films were compared with those of CuO films deposited by conventional DC sputtering. X-ray diffraction analysis revealed that nanocrystallite size, single phase cupric oxide thin films with monoclinic structure were formed in all deposition modes. However, superimposing the direct current during off-time of HiPIMS pulsing allowed formation of denser film with smooth surface and good optical properties.
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U2 - 10.1088/1742-6596/1393/1/012127
DO - 10.1088/1742-6596/1393/1/012127
M3 - Conference article
AN - SCOPUS:85077963595
VL - 1393
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
SN - 1742-6588
IS - 1
M1 - 012127
T2 - 14th International Conference on Gas Discharge Plasmas and Their Applications, GDP 2019
Y2 - 15 September 2019 through 21 September 2019
ER -