Correction of the distribution profiles of the intensities of elements considering the uneven dispersion of the glow-discharge optical emission spectrometer for multilayer coatings analysis

Ivan Shulepov, Anton Lomygin, Laptev Roman, Egor Kashkarov, Maksim Syrtanov

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Multilayer coatings are of great interest in applications ranging from optical to protective coatings. Several interesting properties of multilayer systems are due to the presence of an unusual structure, multiple boundaries, etc. As with any coating, multilayer systems require material degradation control when used and quality control when coatings are formed. Glow discharge optical emission spectrometry (GD-OES) is one of the methods allowing to resolve ultra-thin layers and have high depth resolution. GD-OES has some problems that affect the research results. One of them is obtaining depth distribution profiles of concentrations in heterogeneous structures. This paper shows the possibility to correct spectra after analysis by taking into account the non-uniformity of atomization due to the presence of instrumental and physical artefacts, as well as using a set of methods GD-OES - EAS (electronic Auger Spectroscopy) to obtain the distribution of concentrations at depth.

Original languageEnglish
Title of host publicationProceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1155-1159
Number of pages5
ISBN (Electronic)9781728126869
DOIs
Publication statusPublished - 14 Sep 2020
Event7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020 - Virtual, Tomsk, Russian Federation
Duration: 14 Sep 202026 Sep 2020

Publication series

NameProceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020

Conference

Conference7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020
CountryRussian Federation
CityVirtual, Tomsk
Period14.9.2026.9.20

Keywords

  • EAS
  • GD-OES
  • Multilayer coatings
  • Zr/Nb

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Energy Engineering and Power Technology

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