@inproceedings{637f588a903e4cafa72b4b6e0fd41e16,
title = "Correction of the distribution profiles of the intensities of elements considering the uneven dispersion of the glow-discharge optical emission spectrometer for multilayer coatings analysis",
abstract = "Multilayer coatings are of great interest in applications ranging from optical to protective coatings. Several interesting properties of multilayer systems are due to the presence of an unusual structure, multiple boundaries, etc. As with any coating, multilayer systems require material degradation control when used and quality control when coatings are formed. Glow discharge optical emission spectrometry (GD-OES) is one of the methods allowing to resolve ultra-thin layers and have high depth resolution. GD-OES has some problems that affect the research results. One of them is obtaining depth distribution profiles of concentrations in heterogeneous structures. This paper shows the possibility to correct spectra after analysis by taking into account the non-uniformity of atomization due to the presence of instrumental and physical artefacts, as well as using a set of methods GD-OES - EAS (electronic Auger Spectroscopy) to obtain the distribution of concentrations at depth.",
keywords = "EAS, GD-OES, Multilayer coatings, Zr/Nb",
author = "Ivan Shulepov and Anton Lomygin and Laptev Roman and Egor Kashkarov and Maksim Syrtanov",
note = "Funding Information: The research was funded by the Governmental program “Science”, research project No. FSWW–2020–0017. Funding Information: ACKNOWLEDGMENT The research was funded by the Governmental program “Science”, research project No. FSWW–2020–0017. Publisher Copyright: {\textcopyright} 2020 IEEE. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.; 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020 ; Conference date: 14-09-2020 Through 26-09-2020",
year = "2020",
month = sep,
day = "14",
doi = "10.1109/EFRE47760.2020.9241958",
language = "English",
series = "Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1155--1159",
booktitle = "Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020",
address = "United States",
}