Copper sputtering by power ion beam: Structure and phase composition of the target and film

Yu F. Ivanov, G. E. Remnev, A. N. Zakutaev, V. M. Matvienko, A. V. Potemkin

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Structure and phase studies of copper target and copper thin films deposited on glass as a result of the action of high-power ion beam (HPIB) on the metal have been carried out using the methods of transmission electron microscopy and optical metallography. Polycrystalline copper of technical grade was used as a target material. It is shown that HPIB parameters and structural state of the target determine the size and density of droplet fraction on the film. It has been established that the treatment of copper target with a high-power ion beam leads to the metal of structure and phase state modification. Formation of particles of cubic graphite with crystal lattice parameter a=0.4279 nm in the target surface layer has been found.

Original languageEnglish
Pages (from-to)24-30
Number of pages7
JournalFizika i Khimiya Obrabotki Materialov
Issue number1
Publication statusPublished - 2001

Fingerprint

Phase composition
Ion beams
Sputtering
Copper
Metals
Metallography
Graphite
Crystal lattices
Lattice constants
Transmission electron microscopy
Glass
Thin films

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Copper sputtering by power ion beam : Structure and phase composition of the target and film. / Ivanov, Yu F.; Remnev, G. E.; Zakutaev, A. N.; Matvienko, V. M.; Potemkin, A. V.

In: Fizika i Khimiya Obrabotki Materialov, No. 1, 2001, p. 24-30.

Research output: Contribution to journalArticle

@article{7e59cfaded86434fa7832183ce9086a9,
title = "Copper sputtering by power ion beam: Structure and phase composition of the target and film",
abstract = "Structure and phase studies of copper target and copper thin films deposited on glass as a result of the action of high-power ion beam (HPIB) on the metal have been carried out using the methods of transmission electron microscopy and optical metallography. Polycrystalline copper of technical grade was used as a target material. It is shown that HPIB parameters and structural state of the target determine the size and density of droplet fraction on the film. It has been established that the treatment of copper target with a high-power ion beam leads to the metal of structure and phase state modification. Formation of particles of cubic graphite with crystal lattice parameter a=0.4279 nm in the target surface layer has been found.",
author = "Ivanov, {Yu F.} and Remnev, {G. E.} and Zakutaev, {A. N.} and Matvienko, {V. M.} and Potemkin, {A. V.}",
year = "2001",
language = "English",
pages = "24--30",
journal = "Fizika i Khimiya Obrabotki Materialov",
issn = "0015-3214",
publisher = "Izdatel'stvo Nauka",
number = "1",

}

TY - JOUR

T1 - Copper sputtering by power ion beam

T2 - Structure and phase composition of the target and film

AU - Ivanov, Yu F.

AU - Remnev, G. E.

AU - Zakutaev, A. N.

AU - Matvienko, V. M.

AU - Potemkin, A. V.

PY - 2001

Y1 - 2001

N2 - Structure and phase studies of copper target and copper thin films deposited on glass as a result of the action of high-power ion beam (HPIB) on the metal have been carried out using the methods of transmission electron microscopy and optical metallography. Polycrystalline copper of technical grade was used as a target material. It is shown that HPIB parameters and structural state of the target determine the size and density of droplet fraction on the film. It has been established that the treatment of copper target with a high-power ion beam leads to the metal of structure and phase state modification. Formation of particles of cubic graphite with crystal lattice parameter a=0.4279 nm in the target surface layer has been found.

AB - Structure and phase studies of copper target and copper thin films deposited on glass as a result of the action of high-power ion beam (HPIB) on the metal have been carried out using the methods of transmission electron microscopy and optical metallography. Polycrystalline copper of technical grade was used as a target material. It is shown that HPIB parameters and structural state of the target determine the size and density of droplet fraction on the film. It has been established that the treatment of copper target with a high-power ion beam leads to the metal of structure and phase state modification. Formation of particles of cubic graphite with crystal lattice parameter a=0.4279 nm in the target surface layer has been found.

UR - http://www.scopus.com/inward/record.url?scp=0035778151&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0035778151&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0035778151

SP - 24

EP - 30

JO - Fizika i Khimiya Obrabotki Materialov

JF - Fizika i Khimiya Obrabotki Materialov

SN - 0015-3214

IS - 1

ER -