Abstract
Structure and phase studies of copper target and copper thin films deposited on glass as a result of the action of high-power ion beam (HPIB) on the metal have been carried out using the methods of transmission electron microscopy and optical metallography. Polycrystalline copper of technical grade was used as a target material. It is shown that HPIB parameters and structural state of the target determine the size and density of droplet fraction on the film. It has been established that the treatment of copper target with a high-power ion beam leads to the metal of structure and phase state modification. Formation of particles of cubic graphite with crystal lattice parameter a=0.4279 nm in the target surface layer has been found.
| Original language | English |
|---|---|
| Pages (from-to) | 24-30 |
| Number of pages | 7 |
| Journal | Fizika i Khimiya Obrabotki Materialov |
| Issue number | 1 |
| Publication status | Published - 2001 |
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ASJC Scopus subject areas
- Materials Science(all)
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Copper sputtering by power ion beam : Structure and phase composition of the target and film. / Ivanov, Yu F.; Remnev, G. E.; Zakutaev, A. N.; Matvienko, V. M.; Potemkin, A. V.
In: Fizika i Khimiya Obrabotki Materialov, No. 1, 2001, p. 24-30.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Copper sputtering by power ion beam
T2 - Structure and phase composition of the target and film
AU - Ivanov, Yu F.
AU - Remnev, G. E.
AU - Zakutaev, A. N.
AU - Matvienko, V. M.
AU - Potemkin, A. V.
PY - 2001
Y1 - 2001
N2 - Structure and phase studies of copper target and copper thin films deposited on glass as a result of the action of high-power ion beam (HPIB) on the metal have been carried out using the methods of transmission electron microscopy and optical metallography. Polycrystalline copper of technical grade was used as a target material. It is shown that HPIB parameters and structural state of the target determine the size and density of droplet fraction on the film. It has been established that the treatment of copper target with a high-power ion beam leads to the metal of structure and phase state modification. Formation of particles of cubic graphite with crystal lattice parameter a=0.4279 nm in the target surface layer has been found.
AB - Structure and phase studies of copper target and copper thin films deposited on glass as a result of the action of high-power ion beam (HPIB) on the metal have been carried out using the methods of transmission electron microscopy and optical metallography. Polycrystalline copper of technical grade was used as a target material. It is shown that HPIB parameters and structural state of the target determine the size and density of droplet fraction on the film. It has been established that the treatment of copper target with a high-power ion beam leads to the metal of structure and phase state modification. Formation of particles of cubic graphite with crystal lattice parameter a=0.4279 nm in the target surface layer has been found.
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UR - http://www.scopus.com/inward/citedby.url?scp=0035778151&partnerID=8YFLogxK
M3 - Article
SP - 24
EP - 30
JO - Fizika i Khimiya Obrabotki Materialov
JF - Fizika i Khimiya Obrabotki Materialov
SN - 0015-3214
IS - 1
ER -