Copper oxide atomic layer deposition on thermally pretreated multi-walled carbon nanotubes for interconnect applications

Marcel Melzer, Thomas Waechtler, Steve Mul̈ler, Holger Fiedler, Sascha Hermann, Raul D. Rodriguez, Alexander Villabona, Andrea Sendzik, Robert Mothes, Stefan E. Schulz, Dietrich R.T. Zahn, Michael Hietschold, Heinrich Lang, Thomas Gessner

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6 Citations (Scopus)

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