Contamination of magnetron sputtered metallic films by oxygen from residual atmosphere in deposition chamber

Petr Pokorný, Jindřich Musil, Přemysl Fitl, Michal Novotný, Jan Lančok, Jiří Bulíř

Research output: Contribution to journalArticle

20 Citations (Scopus)

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Physics & Astronomy

Chemical Compounds

Engineering & Materials Science