Comparison of hydrophilic properties of TiO2 thin films prepared by sol-gel method and reactive magnetron sputtering system

S. H. Nam, S. J. Cho, C. K. Jung, J. H. Boo, J. Šícha, D. Heřman, J. Musil, J. Vlček

Research output: Contribution to journalArticle

37 Citations (Scopus)

Abstract

This article reports on preparation, characterization and comparison of TiO2 films prepared by sol-gel method using the titanium isopropoxide sol (TiO2 coating sol 3%) as solvent precursor and reactive magnetron sputtering from substoichiometric TiO2 - x targets of 50 mm in diameter. Dual magnetron supplied by dc bipolar pulsed power source was used for reactive magnetron sputtering. Depositions were performed on unheated glass substrates. Comparison of photocatalytic properties was based on measurements of hydrophilicity, i.e. evaluation of water contact angle on the film surface after UV irradiation. It is shown, that TiO2 films prepared by the sol-gel method exhibited higher hydrophilicity in the as-deposited state but has significant deterioration of hydrophilicity during aging, compared to TiO 2 films prepared by magnetron sputtering. To explain this effect AFM, SEM and high resolution XPS measurements were performed. It is shown that the deterioration of hydrophilicity of sol-gel TiO2 films can be suppressed if as-deposited films are exposed to the plasma of microwave oxygen discharge.

Original languageEnglish
Pages (from-to)6944-6950
Number of pages7
JournalThin Solid Films
Volume519
Issue number20
DOIs
Publication statusPublished - 1 Aug 2011

Fingerprint

Reactive sputtering
Magnetron sputtering
Sol-gel process
magnetron sputtering
Hydrophilicity
gels
Thin films
thin films
Polymethyl Methacrylate
Sols
deterioration
Deterioration
Contact angle
Sol-gels
X ray photoelectron spectroscopy
titanium
Titanium
Aging of materials
Microwaves
Irradiation

Keywords

  • Oxygen plasma treatment
  • Photocatalytic property
  • Reactive magnetron sputtering
  • Sol-gel
  • TiO films

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Nam, S. H., Cho, S. J., Jung, C. K., Boo, J. H., Šícha, J., Heřman, D., ... Vlček, J. (2011). Comparison of hydrophilic properties of TiO2 thin films prepared by sol-gel method and reactive magnetron sputtering system. Thin Solid Films, 519(20), 6944-6950. https://doi.org/10.1016/j.tsf.2011.04.144

Comparison of hydrophilic properties of TiO2 thin films prepared by sol-gel method and reactive magnetron sputtering system. / Nam, S. H.; Cho, S. J.; Jung, C. K.; Boo, J. H.; Šícha, J.; Heřman, D.; Musil, J.; Vlček, J.

In: Thin Solid Films, Vol. 519, No. 20, 01.08.2011, p. 6944-6950.

Research output: Contribution to journalArticle

Nam, S. H. ; Cho, S. J. ; Jung, C. K. ; Boo, J. H. ; Šícha, J. ; Heřman, D. ; Musil, J. ; Vlček, J. / Comparison of hydrophilic properties of TiO2 thin films prepared by sol-gel method and reactive magnetron sputtering system. In: Thin Solid Films. 2011 ; Vol. 519, No. 20. pp. 6944-6950.
@article{669b8bf04e704e4c8adf28be67d4130c,
title = "Comparison of hydrophilic properties of TiO2 thin films prepared by sol-gel method and reactive magnetron sputtering system",
abstract = "This article reports on preparation, characterization and comparison of TiO2 films prepared by sol-gel method using the titanium isopropoxide sol (TiO2 coating sol 3{\%}) as solvent precursor and reactive magnetron sputtering from substoichiometric TiO2 - x targets of 50 mm in diameter. Dual magnetron supplied by dc bipolar pulsed power source was used for reactive magnetron sputtering. Depositions were performed on unheated glass substrates. Comparison of photocatalytic properties was based on measurements of hydrophilicity, i.e. evaluation of water contact angle on the film surface after UV irradiation. It is shown, that TiO2 films prepared by the sol-gel method exhibited higher hydrophilicity in the as-deposited state but has significant deterioration of hydrophilicity during aging, compared to TiO 2 films prepared by magnetron sputtering. To explain this effect AFM, SEM and high resolution XPS measurements were performed. It is shown that the deterioration of hydrophilicity of sol-gel TiO2 films can be suppressed if as-deposited films are exposed to the plasma of microwave oxygen discharge.",
keywords = "Oxygen plasma treatment, Photocatalytic property, Reactive magnetron sputtering, Sol-gel, TiO films",
author = "Nam, {S. H.} and Cho, {S. J.} and Jung, {C. K.} and Boo, {J. H.} and J. Š{\'i}cha and D. Heřman and J. Musil and J. Vlček",
year = "2011",
month = "8",
day = "1",
doi = "10.1016/j.tsf.2011.04.144",
language = "English",
volume = "519",
pages = "6944--6950",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier",
number = "20",

}

TY - JOUR

T1 - Comparison of hydrophilic properties of TiO2 thin films prepared by sol-gel method and reactive magnetron sputtering system

AU - Nam, S. H.

AU - Cho, S. J.

AU - Jung, C. K.

AU - Boo, J. H.

AU - Šícha, J.

AU - Heřman, D.

AU - Musil, J.

AU - Vlček, J.

PY - 2011/8/1

Y1 - 2011/8/1

N2 - This article reports on preparation, characterization and comparison of TiO2 films prepared by sol-gel method using the titanium isopropoxide sol (TiO2 coating sol 3%) as solvent precursor and reactive magnetron sputtering from substoichiometric TiO2 - x targets of 50 mm in diameter. Dual magnetron supplied by dc bipolar pulsed power source was used for reactive magnetron sputtering. Depositions were performed on unheated glass substrates. Comparison of photocatalytic properties was based on measurements of hydrophilicity, i.e. evaluation of water contact angle on the film surface after UV irradiation. It is shown, that TiO2 films prepared by the sol-gel method exhibited higher hydrophilicity in the as-deposited state but has significant deterioration of hydrophilicity during aging, compared to TiO 2 films prepared by magnetron sputtering. To explain this effect AFM, SEM and high resolution XPS measurements were performed. It is shown that the deterioration of hydrophilicity of sol-gel TiO2 films can be suppressed if as-deposited films are exposed to the plasma of microwave oxygen discharge.

AB - This article reports on preparation, characterization and comparison of TiO2 films prepared by sol-gel method using the titanium isopropoxide sol (TiO2 coating sol 3%) as solvent precursor and reactive magnetron sputtering from substoichiometric TiO2 - x targets of 50 mm in diameter. Dual magnetron supplied by dc bipolar pulsed power source was used for reactive magnetron sputtering. Depositions were performed on unheated glass substrates. Comparison of photocatalytic properties was based on measurements of hydrophilicity, i.e. evaluation of water contact angle on the film surface after UV irradiation. It is shown, that TiO2 films prepared by the sol-gel method exhibited higher hydrophilicity in the as-deposited state but has significant deterioration of hydrophilicity during aging, compared to TiO 2 films prepared by magnetron sputtering. To explain this effect AFM, SEM and high resolution XPS measurements were performed. It is shown that the deterioration of hydrophilicity of sol-gel TiO2 films can be suppressed if as-deposited films are exposed to the plasma of microwave oxygen discharge.

KW - Oxygen plasma treatment

KW - Photocatalytic property

KW - Reactive magnetron sputtering

KW - Sol-gel

KW - TiO films

UR - http://www.scopus.com/inward/record.url?scp=80051552695&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=80051552695&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2011.04.144

DO - 10.1016/j.tsf.2011.04.144

M3 - Article

VL - 519

SP - 6944

EP - 6950

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

IS - 20

ER -