Comparative Study of Cu Films Prepared by DC, High-Power Pulsed and Burst Magnetron Sputtering

A. A. Solovyev, V. O. Oskirko, V. A. Semenov, K. V. Oskomov, S. V. Rabotkin

Research output: Contribution to journalArticle

12 Citations (Scopus)

Fingerprint Dive into the research topics of 'Comparative Study of Cu Films Prepared by DC, High-Power Pulsed and Burst Magnetron Sputtering'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy