Abstract
Transition and Parametric radiators are proposed as sources for EUVL and XRL. Collimated soft x rays and extreme ultraviolet (EUV) radiation can be generated using electron beams with moderate electron-beam energies, unlike synchrotron radiators, which require energies of greater than 300 MeV. Earlier work focused on using transition radiation in the 0.5-3.0 keV range with electron beam energies between 17-100 MeV for output wavelength around 1.4 nm. However, tunable quasi-monochromatic emission in the EUV as well as x-ray regions can be also obtained using parametric radiators. We propose that a compact betatron be used to recycle the beam through these radiators for higher x-ray efficiency. Experiments using storage rings and simulations using known betatron parameters are presented here that demonstrate the electron beam can be recycled through the thin radiators up to 300 times. With this increase in efficiency, the source output power is expected in the range of 100 mW.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of SPIE - The International Society for Optical Engineering |
| Editors | Y Vladimirsky |
| Pages | 450-463 |
| Number of pages | 14 |
| Volume | 3331 |
| DOIs | |
| Publication status | Published - 1998 |
| Event | Emerging Lithographic Technologies II - Santa Clara, CA, United States Duration: 23 Feb 1998 → 25 Feb 1998 |
Other
| Other | Emerging Lithographic Technologies II |
|---|---|
| Country | United States |
| City | Santa Clara, CA |
| Period | 23.2.98 → 25.2.98 |
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Keywords
- Betatrons
- Electron accelerators
- Step-and-scan
- Transition radiation
- X-ray lithography
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Condensed Matter Physics
Cite this
Compact recycled beam source for XRL and EUVL exposure tools. / Piestrup, M. A.; Powell, M. W.; Cremer, J. T.; Lombardo, L. W.; Kaplin, V. V.; Mihal'chuk, A. A.; Uglov, S. R.; Zabaev, V. N.; Skopik, D. M.; Silzer, R. M.; Retzlaff, G. A.
Proceedings of SPIE - The International Society for Optical Engineering. ed. / Y Vladimirsky. Vol. 3331 1998. p. 450-463.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Compact recycled beam source for XRL and EUVL exposure tools
AU - Piestrup, M. A.
AU - Powell, M. W.
AU - Cremer, J. T.
AU - Lombardo, L. W.
AU - Kaplin, V. V.
AU - Mihal'chuk, A. A.
AU - Uglov, S. R.
AU - Zabaev, V. N.
AU - Skopik, D. M.
AU - Silzer, R. M.
AU - Retzlaff, G. A.
PY - 1998
Y1 - 1998
N2 - Transition and Parametric radiators are proposed as sources for EUVL and XRL. Collimated soft x rays and extreme ultraviolet (EUV) radiation can be generated using electron beams with moderate electron-beam energies, unlike synchrotron radiators, which require energies of greater than 300 MeV. Earlier work focused on using transition radiation in the 0.5-3.0 keV range with electron beam energies between 17-100 MeV for output wavelength around 1.4 nm. However, tunable quasi-monochromatic emission in the EUV as well as x-ray regions can be also obtained using parametric radiators. We propose that a compact betatron be used to recycle the beam through these radiators for higher x-ray efficiency. Experiments using storage rings and simulations using known betatron parameters are presented here that demonstrate the electron beam can be recycled through the thin radiators up to 300 times. With this increase in efficiency, the source output power is expected in the range of 100 mW.
AB - Transition and Parametric radiators are proposed as sources for EUVL and XRL. Collimated soft x rays and extreme ultraviolet (EUV) radiation can be generated using electron beams with moderate electron-beam energies, unlike synchrotron radiators, which require energies of greater than 300 MeV. Earlier work focused on using transition radiation in the 0.5-3.0 keV range with electron beam energies between 17-100 MeV for output wavelength around 1.4 nm. However, tunable quasi-monochromatic emission in the EUV as well as x-ray regions can be also obtained using parametric radiators. We propose that a compact betatron be used to recycle the beam through these radiators for higher x-ray efficiency. Experiments using storage rings and simulations using known betatron parameters are presented here that demonstrate the electron beam can be recycled through the thin radiators up to 300 times. With this increase in efficiency, the source output power is expected in the range of 100 mW.
KW - Betatrons
KW - Electron accelerators
KW - Step-and-scan
KW - Transition radiation
KW - X-ray lithography
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UR - http://www.scopus.com/inward/citedby.url?scp=0009307963&partnerID=8YFLogxK
U2 - 10.1117/12.309599
DO - 10.1117/12.309599
M3 - Conference contribution
VL - 3331
SP - 450
EP - 463
BT - Proceedings of SPIE - The International Society for Optical Engineering
A2 - Vladimirsky, Y
ER -