Coating composition evolution during the deposition of Al and N from plasma on a cylindrical substrate

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Abstract

This paper presents the results of the numerical study of the coating composition evolution deposited on a cylindrical specimen from plasma containing aluminum and nitrogen. Calculations were based on a coupling model, which accounted for various transfer mechanisms and staged chemical reactions in the coating and in the transient zone. The evolution of the coating composition is connected with transfer processes, chemical reactions, and with the change of effective properties.

Original languageEnglish
Pages (from-to)690-694
Number of pages5
JournalKey Engineering Materials
Volume685
DOIs
Publication statusPublished - 2016
Event4th International Conference for Young Scientists High Technology: Research and Applications, HTRA 2015 - Tomsk, Russian Federation
Duration: 21 Apr 201524 Apr 2015

Keywords

  • Coating deposition
  • Cross effects
  • Kinetics
  • Numerical modeling
  • Phase formation
  • Stresses and strains
  • Thermodynamics

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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