Abstract
This paper presents the results of the numerical study of the coating composition evolution deposited on a cylindrical specimen from plasma containing aluminum and nitrogen. Calculations were based on a coupling model, which accounted for various transfer mechanisms and staged chemical reactions in the coating and in the transient zone. The evolution of the coating composition is connected with transfer processes, chemical reactions, and with the change of effective properties.
Original language | English |
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Pages (from-to) | 690-694 |
Number of pages | 5 |
Journal | Key Engineering Materials |
Volume | 685 |
DOIs | |
Publication status | Published - 2016 |
Event | 4th International Conference for Young Scientists High Technology: Research and Applications, HTRA 2015 - Tomsk, Russian Federation Duration: 21 Apr 2015 → 24 Apr 2015 |
Keywords
- Coating deposition
- Cross effects
- Kinetics
- Numerical modeling
- Phase formation
- Stresses and strains
- Thermodynamics
ASJC Scopus subject areas
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering