Characteristics of (TiAlCrNbY)C films deposited by reactive magnetron sputtering

M. Braic, V. Braic, M. Balaceanu, C. N. Zoita, A. Vladescu, E. Grigore

Research output: Contribution to journalArticle

28 Citations (Scopus)

Abstract

(TiAlCrNbY)C multi-component carbide coatings were prepared by reactive co-sputtering of Ti, Al, Cr, Nb and Y targets in an Ar + CH4 atmosphere. The films were investigated for elemental and phase composition, chemical binding state, texture, morphology, residual stress, roughness, hardness, friction and wear using X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), atomic force microscopy (AFM), surface profilometry, hardness measurements, and tribological tests. The metals in the carbide films were found in an almost equiatomic ratio, whereas the carbon content varied from about 46 to 82 at.%. For film composition close to stoichiometry, a single fcc solid solution phase with an (111) preferred orientation was detected. The coatings with higher carbon concentrations (69-82 at.%) exhibited an amorphous structure. Fine grained and smooth surface morphologies were observed by AFM. While the metallic film exhibited a low tensile stress (∼ 0.240 GPa), the carbides coatings were subjected to compressive stress, with values (from 0.200 to 1.950 GPa) strongly depending on CH4 flow rate. The hardness values (13-23 GPa) were found to be lower than those usually reported for binary carbides (30-35 GPa), while the dry friction coefficients were in the range 0.05-0.25.

Original languageEnglish
Pages (from-to)2010-2014
Number of pages5
JournalSurface and Coatings Technology
Volume204
Issue number12-13
DOIs
Publication statusPublished - 15 Mar 2010
Externally publishedYes

Fingerprint

Reactive sputtering
carbides
Magnetron sputtering
Carbides
magnetron sputtering
hardness
Hardness
coatings
Coatings
Atomic force microscopy
Carbon
atomic force microscopy
Friction
dry friction
Metallic films
Profilometry
carbon
tensile stress
Compressive stress
Phase composition

Keywords

  • Magnetron sputtering
  • Mechanical
  • Multi-component (TiAlCrNbY)C coatings
  • Structure
  • Tribological performance

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

Characteristics of (TiAlCrNbY)C films deposited by reactive magnetron sputtering. / Braic, M.; Braic, V.; Balaceanu, M.; Zoita, C. N.; Vladescu, A.; Grigore, E.

In: Surface and Coatings Technology, Vol. 204, No. 12-13, 15.03.2010, p. 2010-2014.

Research output: Contribution to journalArticle

Braic, M. ; Braic, V. ; Balaceanu, M. ; Zoita, C. N. ; Vladescu, A. ; Grigore, E. / Characteristics of (TiAlCrNbY)C films deposited by reactive magnetron sputtering. In: Surface and Coatings Technology. 2010 ; Vol. 204, No. 12-13. pp. 2010-2014.
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