Structure and phase changes in ion-plasma deposited TiN coating exposed to power pulses of ion beams have been investigated with the help of TEM technique. Depth evolution of the coating structure and phase changes are analyzed.
|Number of pages||6|
|Journal||Fizika i Khimiya Obrabotki Materialov|
|Publication status||Published - 2000|
ASJC Scopus subject areas
- Materials Science(all)