Changes of structure and phase conditions of TiN coating under the action of power ion beams

K. N. Poleshchenko, G. E. Remnev, Yu F. Ivanov, I. G. Voloshina, S. N. Povoroznyuk, G. A. Vershinin

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Structure and phase changes in ion-plasma deposited TiN coating exposed to power pulses of ion beams have been investigated with the help of TEM technique. Depth evolution of the coating structure and phase changes are analyzed.

Original languageEnglish
Pages (from-to)18-23
Number of pages6
JournalFizika i Khimiya Obrabotki Materialov
Issue number3
Publication statusPublished - 2000

ASJC Scopus subject areas

  • Materials Science(all)

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