Cellular automata modeling of microcrystalline structure formation

Mikhail Mikolaychuk, Anna Knyazeva

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The paper discusses the problem of microcrystalline structure formation during magnetron sputtering. The authors suggest the model based on cellular automata approach combined with chemical kinetics considerations, briefly discuss a practical way for kinetic constants evaluation and derive their accurate values. The work numerically solves a particular problem of coating formation by magnetron sputter deposition in multicomponent chemically active plasma.

Original languageEnglish
Title of host publicationAIP Conference Proceedings
PublisherAmerican Institute of Physics Inc.
Pages419-422
Number of pages4
Volume1623
ISBN (Print)9780735412606
DOIs
Publication statusPublished - 2014
EventInternational Conference on Physical Mesomechanics of Multilevel Systems 2014 - Tomsk, Russian Federation
Duration: 3 Sep 20145 Sep 2014

Other

OtherInternational Conference on Physical Mesomechanics of Multilevel Systems 2014
CountryRussian Federation
CityTomsk
Period3.9.145.9.14

Keywords

  • Cellular automata
  • Magnetron
  • Microcrystalline structure
  • Plasma
  • Simulation

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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  • Cite this

    Mikolaychuk, M., & Knyazeva, A. (2014). Cellular automata modeling of microcrystalline structure formation. In AIP Conference Proceedings (Vol. 1623, pp. 419-422). American Institute of Physics Inc.. https://doi.org/10.1063/1.4898971