Capacitive discharge excilamps

Edward A. Sosnin, Mikhail V. Erofeev, Alexei N. Panchenko, Mikhail I. Lomaev, Victor S. Skakun, Dmitrii V. Shitz, Victor F. Tarasenko

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Investigation was made of the characteristics of XeCl (λ approximately 308 nm), KrCl (λ approximately 222 nm) and XeI (λ approximately 253 nm) capacitive discharge excilamps. High efficiency of exciplex molecules and simple design have been obtained under capacitive HF discharge excitation. Cylindrical excilamps with radiation output through side surface of the cylinder and through one or two windows placed on the tube ends have been developed. High UV radiation power and electrical power deposition to fluorescence conversion resulted in efficiencies of up to 12%. The study of XeCl, KrCl and XeI excilamps have shown, that it is possible to create sealed-off samples with lifetime more than 1000 hours. The stability of output parameters of the capacitive discharge excilamps is studied and the mechanism of chlorine losses in low pressure halogencontaining excilamps made of quartz was determined. The possibility of creation of capacitive discharge excilamps with short pulse duration was studied. In capacitive discharge cylindrical KrCl-excilamp, at λ approximately 222 nm the radiation pulse power up to 2.5 kW was obtained. Powerful radiation pulses 50 ns in duration were obtained at pulse repetition rate of 1 kHz.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherSociety of Photo-Optical Instrumentation Engineers
Pages425-431
Number of pages7
Volume3933
Publication statusPublished - 2000
EventLaser Applications in Microelectronic and Optoelectronic Manufacturing V - San Jose, CA, USA
Duration: 24 Jan 200026 Jan 2000

Other

OtherLaser Applications in Microelectronic and Optoelectronic Manufacturing V
CitySan Jose, CA, USA
Period24.1.0026.1.00

Fingerprint

Radiation
radiation
Pulse repetition rate
Ultraviolet radiation
Chlorine
Quartz
Laser pulses
Fluorescence
output
pulse repetition rate
pulses
Molecules
chlorine
pulse duration
quartz
low pressure
tubes
life (durability)
fluorescence
excitation

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Sosnin, E. A., Erofeev, M. V., Panchenko, A. N., Lomaev, M. I., Skakun, V. S., Shitz, D. V., & Tarasenko, V. F. (2000). Capacitive discharge excilamps. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 3933, pp. 425-431). Society of Photo-Optical Instrumentation Engineers.

Capacitive discharge excilamps. / Sosnin, Edward A.; Erofeev, Mikhail V.; Panchenko, Alexei N.; Lomaev, Mikhail I.; Skakun, Victor S.; Shitz, Dmitrii V.; Tarasenko, Victor F.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3933 Society of Photo-Optical Instrumentation Engineers, 2000. p. 425-431.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Sosnin, EA, Erofeev, MV, Panchenko, AN, Lomaev, MI, Skakun, VS, Shitz, DV & Tarasenko, VF 2000, Capacitive discharge excilamps. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 3933, Society of Photo-Optical Instrumentation Engineers, pp. 425-431, Laser Applications in Microelectronic and Optoelectronic Manufacturing V, San Jose, CA, USA, 24.1.00.
Sosnin EA, Erofeev MV, Panchenko AN, Lomaev MI, Skakun VS, Shitz DV et al. Capacitive discharge excilamps. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3933. Society of Photo-Optical Instrumentation Engineers. 2000. p. 425-431
Sosnin, Edward A. ; Erofeev, Mikhail V. ; Panchenko, Alexei N. ; Lomaev, Mikhail I. ; Skakun, Victor S. ; Shitz, Dmitrii V. ; Tarasenko, Victor F. / Capacitive discharge excilamps. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3933 Society of Photo-Optical Instrumentation Engineers, 2000. pp. 425-431
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AU - Skakun, Victor S.

AU - Shitz, Dmitrii V.

AU - Tarasenko, Victor F.

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N2 - Investigation was made of the characteristics of XeCl (λ approximately 308 nm), KrCl (λ approximately 222 nm) and XeI (λ approximately 253 nm) capacitive discharge excilamps. High efficiency of exciplex molecules and simple design have been obtained under capacitive HF discharge excitation. Cylindrical excilamps with radiation output through side surface of the cylinder and through one or two windows placed on the tube ends have been developed. High UV radiation power and electrical power deposition to fluorescence conversion resulted in efficiencies of up to 12%. The study of XeCl, KrCl and XeI excilamps have shown, that it is possible to create sealed-off samples with lifetime more than 1000 hours. The stability of output parameters of the capacitive discharge excilamps is studied and the mechanism of chlorine losses in low pressure halogencontaining excilamps made of quartz was determined. The possibility of creation of capacitive discharge excilamps with short pulse duration was studied. In capacitive discharge cylindrical KrCl-excilamp, at λ approximately 222 nm the radiation pulse power up to 2.5 kW was obtained. Powerful radiation pulses 50 ns in duration were obtained at pulse repetition rate of 1 kHz.

AB - Investigation was made of the characteristics of XeCl (λ approximately 308 nm), KrCl (λ approximately 222 nm) and XeI (λ approximately 253 nm) capacitive discharge excilamps. High efficiency of exciplex molecules and simple design have been obtained under capacitive HF discharge excitation. Cylindrical excilamps with radiation output through side surface of the cylinder and through one or two windows placed on the tube ends have been developed. High UV radiation power and electrical power deposition to fluorescence conversion resulted in efficiencies of up to 12%. The study of XeCl, KrCl and XeI excilamps have shown, that it is possible to create sealed-off samples with lifetime more than 1000 hours. The stability of output parameters of the capacitive discharge excilamps is studied and the mechanism of chlorine losses in low pressure halogencontaining excilamps made of quartz was determined. The possibility of creation of capacitive discharge excilamps with short pulse duration was studied. In capacitive discharge cylindrical KrCl-excilamp, at λ approximately 222 nm the radiation pulse power up to 2.5 kW was obtained. Powerful radiation pulses 50 ns in duration were obtained at pulse repetition rate of 1 kHz.

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