Abstract
Cubic yttria-stabilized zirconia (YSZ) thin films were deposited by reactive magnetron sputtering on NiO-YSZ fuel cell anodes under different conditions. The influence of substrate bias voltage, temperature and porosity on texture and morphology of the deposited films were investigated. Comparing film morphology of YSZ grown on NiO-YSZ anodes, it was found that films deposited on a substrate with a large porosity were columnar and contained voids regardless of the deposition parameters. It was shown that only using of anode support with very high surface quality, substrate heating up to 500 °C and pulsed substrate bias (about -30 V MF) during film deposition is necessary for deposition of non-columnar thin films without voids and cracks that may be suitable for SOFC application.
| Original language | English |
|---|---|
| Article number | 012010 |
| Journal | Journal of Physics: Conference Series |
| Volume | 552 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2014 |
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ASJC Scopus subject areas
- Physics and Astronomy(all)
Cite this
Bias-assisted magnetron sputtering of yttria-stabilised zirconia thin films. / Solovyev, A. A.; Rabotkin, S. V.; Ionov, Igor Vyacheslavovich; Shipilova, Anna Victorovna; Kovalchuk, Anastasia Nikolaevna; Borduleva, Alena Olegovna.
In: Journal of Physics: Conference Series, Vol. 552, No. 1, 012010, 2014.Research output: Contribution to journal › Article
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TY - JOUR
T1 - Bias-assisted magnetron sputtering of yttria-stabilised zirconia thin films
AU - Solovyev, A. A.
AU - Rabotkin, S. V.
AU - Ionov, Igor Vyacheslavovich
AU - Shipilova, Anna Victorovna
AU - Kovalchuk, Anastasia Nikolaevna
AU - Borduleva, Alena Olegovna
PY - 2014
Y1 - 2014
N2 - Cubic yttria-stabilized zirconia (YSZ) thin films were deposited by reactive magnetron sputtering on NiO-YSZ fuel cell anodes under different conditions. The influence of substrate bias voltage, temperature and porosity on texture and morphology of the deposited films were investigated. Comparing film morphology of YSZ grown on NiO-YSZ anodes, it was found that films deposited on a substrate with a large porosity were columnar and contained voids regardless of the deposition parameters. It was shown that only using of anode support with very high surface quality, substrate heating up to 500 °C and pulsed substrate bias (about -30 V MF) during film deposition is necessary for deposition of non-columnar thin films without voids and cracks that may be suitable for SOFC application.
AB - Cubic yttria-stabilized zirconia (YSZ) thin films were deposited by reactive magnetron sputtering on NiO-YSZ fuel cell anodes under different conditions. The influence of substrate bias voltage, temperature and porosity on texture and morphology of the deposited films were investigated. Comparing film morphology of YSZ grown on NiO-YSZ anodes, it was found that films deposited on a substrate with a large porosity were columnar and contained voids regardless of the deposition parameters. It was shown that only using of anode support with very high surface quality, substrate heating up to 500 °C and pulsed substrate bias (about -30 V MF) during film deposition is necessary for deposition of non-columnar thin films without voids and cracks that may be suitable for SOFC application.
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U2 - 10.1088/1742-6596/552/1/012010
DO - 10.1088/1742-6596/552/1/012010
M3 - Article
VL - 552
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
SN - 1742-6588
IS - 1
M1 - 012010
ER -