Ballistic formation of high-intensity low-energy gas ion beams

Research output: Contribution to journalArticle

Abstract

The development of the method of high-intensity implantation of low-energy ions requires the design of an efficient system for generating high-intensity ion beams of various elements with a current density of tens and hundreds of milliamperes per square centimeter with ion energies not exceeding some kiloelectronvolt. This paper considers the regularities of formation of high-intensity beams of nitrogen ions and argon and mixed beams of argon and hydrogen ions in spherical and cylindrical grid systems with ballistic focusing of the ion beam. The studies were carried out with the plasma-immersion formation of repetitively pulsed ion beams with duration from units to hundreds of microseconds and a pulse frequency of up to 105 pulses/s with negative bias potentials in the range from 0.6 to 3 kV. The possibility of stable formation of gas ion beams with an ion current density of up to 0.7 A/cm2 is demonstrated.

Original languageEnglish
Article number013326
JournalReview of Scientific Instruments
Volume91
Issue number1
DOIs
Publication statusPublished - 1 Jan 2020

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Ballistics
ballistics
Ion beams
ion beams
Ions
Gases
gases
argon
Argon
current density
Current density
ions
energy
nitrogen ions
hydrogen ions
pulses
regularity
submerging
ion currents
implantation

ASJC Scopus subject areas

  • Instrumentation

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Ballistic formation of high-intensity low-energy gas ion beams. / Ryabchikov, Alexander I.; Sivin, Denis O.; Shevelev, Alexey E.; Akhmadeev, Yuriy H.; Korneva, Olga S.; Ivanova, Anna I.; Lopatin, Ilya V.

In: Review of Scientific Instruments, Vol. 91, No. 1, 013326, 01.01.2020.

Research output: Contribution to journalArticle

@article{0febd42be84745cfa380fd3bf62fd8d4,
title = "Ballistic formation of high-intensity low-energy gas ion beams",
abstract = "The development of the method of high-intensity implantation of low-energy ions requires the design of an efficient system for generating high-intensity ion beams of various elements with a current density of tens and hundreds of milliamperes per square centimeter with ion energies not exceeding some kiloelectronvolt. This paper considers the regularities of formation of high-intensity beams of nitrogen ions and argon and mixed beams of argon and hydrogen ions in spherical and cylindrical grid systems with ballistic focusing of the ion beam. The studies were carried out with the plasma-immersion formation of repetitively pulsed ion beams with duration from units to hundreds of microseconds and a pulse frequency of up to 105 pulses/s with negative bias potentials in the range from 0.6 to 3 kV. The possibility of stable formation of gas ion beams with an ion current density of up to 0.7 A/cm2 is demonstrated.",
author = "Ryabchikov, {Alexander I.} and Sivin, {Denis O.} and Shevelev, {Alexey E.} and Akhmadeev, {Yuriy H.} and Korneva, {Olga S.} and Ivanova, {Anna I.} and Lopatin, {Ilya V.}",
year = "2020",
month = "1",
day = "1",
doi = "10.1063/1.5128432",
language = "English",
volume = "91",
journal = "Review of Scientific Instruments",
issn = "0034-6748",
publisher = "American Institute of Physics Publising LLC",
number = "1",

}

TY - JOUR

T1 - Ballistic formation of high-intensity low-energy gas ion beams

AU - Ryabchikov, Alexander I.

AU - Sivin, Denis O.

AU - Shevelev, Alexey E.

AU - Akhmadeev, Yuriy H.

AU - Korneva, Olga S.

AU - Ivanova, Anna I.

AU - Lopatin, Ilya V.

PY - 2020/1/1

Y1 - 2020/1/1

N2 - The development of the method of high-intensity implantation of low-energy ions requires the design of an efficient system for generating high-intensity ion beams of various elements with a current density of tens and hundreds of milliamperes per square centimeter with ion energies not exceeding some kiloelectronvolt. This paper considers the regularities of formation of high-intensity beams of nitrogen ions and argon and mixed beams of argon and hydrogen ions in spherical and cylindrical grid systems with ballistic focusing of the ion beam. The studies were carried out with the plasma-immersion formation of repetitively pulsed ion beams with duration from units to hundreds of microseconds and a pulse frequency of up to 105 pulses/s with negative bias potentials in the range from 0.6 to 3 kV. The possibility of stable formation of gas ion beams with an ion current density of up to 0.7 A/cm2 is demonstrated.

AB - The development of the method of high-intensity implantation of low-energy ions requires the design of an efficient system for generating high-intensity ion beams of various elements with a current density of tens and hundreds of milliamperes per square centimeter with ion energies not exceeding some kiloelectronvolt. This paper considers the regularities of formation of high-intensity beams of nitrogen ions and argon and mixed beams of argon and hydrogen ions in spherical and cylindrical grid systems with ballistic focusing of the ion beam. The studies were carried out with the plasma-immersion formation of repetitively pulsed ion beams with duration from units to hundreds of microseconds and a pulse frequency of up to 105 pulses/s with negative bias potentials in the range from 0.6 to 3 kV. The possibility of stable formation of gas ion beams with an ion current density of up to 0.7 A/cm2 is demonstrated.

UR - http://www.scopus.com/inward/record.url?scp=85078517018&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85078517018&partnerID=8YFLogxK

U2 - 10.1063/1.5128432

DO - 10.1063/1.5128432

M3 - Article

AN - SCOPUS:85078517018

VL - 91

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

SN - 0034-6748

IS - 1

M1 - 013326

ER -