Atomic layer deposition of nio to produce active material for thin-film lithium-ion batteries

Yury Koshtyal, Denis Nazarov, Ilya Ezhov, Ilya Mitrofanov, Artem Kim, Aleksander Rymyantsev, Oleksiy Lyutakov, Anatoly Popovich, Maxim Maximov

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1 Citation (Scopus)


Atomic layer deposition (ALD) provides a promising route for depositing uniform thin-film electrodes for Li-ion batteries. In this work, bis(methylcyclopentadienyl) nickel(II) (Ni(MeCp) 2 ) and bis(cyclopentadienyl) nickel(II) (NiCp 2 ) were used as precursors for NiO ALD. Oxygen plasma was used as a counter-reactant. The films were studied by spectroscopic ellipsometry, scanning electron microscopy, atomic force microscopy, X-ray diffraction, X-ray reflectometry, and X-ray photoelectron spectroscopy. The results show that the optimal temperature for the deposition for NiCp 2 was 200-300 °C, but the optimal Ni(MeCp) 2 growth per ALD cycle was 0.011-0.012 nm for both precursors at 250-300 °C. The films deposited using NiCp 2 and oxygen plasma at 300 °C using optimal ALD condition consisted mainly of stoichiometric polycrystalline NiO with high density (6.6 g/cm 3 ) and low roughness (0.34 nm). However, the films contain carbon impurities. The NiO films (thickness 28-30 nm) deposited on stainless steel showed a specific capacity above 1300 mAh/g, which is significantly more than the theoretical capacity of bulk NiO (718 mAh/g) because it includes the capacity of the NiO film and the pseudo-capacity of the gel-like solid electrolyte interface film. The presence of pseudo-capacity and its increase during cycling is discussed based on a detailed analysis of cyclic voltammograms and charge-discharge curves (U(C)).

Original languageEnglish
Article number301
Issue number5
Publication statusPublished - 1 May 2019
Externally publishedYes



  • Atomic layer deposition
  • Li-ion batteries
  • Nickel oxide
  • Thin films

ASJC Scopus subject areas

  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

Koshtyal, Y., Nazarov, D., Ezhov, I., Mitrofanov, I., Kim, A., Rymyantsev, A., Lyutakov, O., Popovich, A., & Maximov, M. (2019). Atomic layer deposition of nio to produce active material for thin-film lithium-ion batteries. Coatings, 9(5), [301].