Atomic layer deposition-developed two-dimensional α-MoO3 windows excellent hydrogen peroxide electrochemical sensing capabilities

Zihan Wei, Zhenyin Hai, Mohammad Karbalaei Akbari, Dongchen Qi, Kaijian Xing, Qing Zhao, Francis Verpoort, Jie Hu, Lachlan Hyde, Serge Zhuiykov

    Research output: Contribution to journalArticle

    • 1 Citations

    Abstract

    Two-dimensional (2D) α-MoO3 nano-films with thickness of 4.9 nm were fabricated via atomic layer deposition (ALD) technique for the first time on the wafer scale and were subsequently annealed at 200 °C. The developed MoO3 nano-films were composed of flat nanoparticles with the average size of about 35 nm and possessed layered orthorhombic phase (α-MoO3). The electrochemical sensor based on these 2D α-MoO3 nano-films exhibited great sensitivity of 168.72 μA mM−1 cm−2 to hydrogen peroxide (H2O2) and presented extremely wide linear detection range of 0.4 μM–57.6 mM with the lowest detection limit of 0.076 μM at the signal to noise ratio of 3. Furthermore, due to extremely thin nature of 2D α-MoO3 nano-films ultra-fast response/recovery time of ∼2.0 s was achieved under the wide linear H2O2 detection range. Additionally, the sensor based on 2D α-MoO3 nano-films was also demonstrated great long-term stability, excellent selectivity and high reproducibility. The 2D α-MoO3 nano-films fabricated via ALD technique in this work represent a great opportunity for development of high-performance electrochemical sensors based on 2D transition metal oxides.

    LanguageEnglish
    Pages334-344
    Number of pages11
    JournalSensors and Actuators, B: Chemical
    Volume262
    DOIs
    Publication statusPublished - 1 Jun 2018

    Fingerprint

    Atomic layer deposition
    atomic layer epitaxy
    hydrogen peroxide
    Hydrogen peroxide
    Hydrogen Peroxide
    Electrochemical sensors
    sensors
    Transition metals
    metal oxides
    molybdenum trioxide
    Signal to noise ratio
    signal to noise ratios
    Oxides
    selectivity
    transition metals
    recovery
    wafers
    Nanoparticles
    Recovery
    nanoparticles

    Keywords

    • Atomic layer deposition
    • Electrochemical sensing
    • Hydrogen peroxide
    • α-MoO

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Instrumentation
    • Condensed Matter Physics
    • Surfaces, Coatings and Films
    • Metals and Alloys
    • Electrical and Electronic Engineering
    • Materials Chemistry

    Cite this

    Atomic layer deposition-developed two-dimensional α-MoO3 windows excellent hydrogen peroxide electrochemical sensing capabilities. / Wei, Zihan; Hai, Zhenyin; Akbari, Mohammad Karbalaei; Qi, Dongchen; Xing, Kaijian; Zhao, Qing; Verpoort, Francis; Hu, Jie; Hyde, Lachlan; Zhuiykov, Serge.

    In: Sensors and Actuators, B: Chemical, Vol. 262, 01.06.2018, p. 334-344.

    Research output: Contribution to journalArticle

    Wei, Zihan ; Hai, Zhenyin ; Akbari, Mohammad Karbalaei ; Qi, Dongchen ; Xing, Kaijian ; Zhao, Qing ; Verpoort, Francis ; Hu, Jie ; Hyde, Lachlan ; Zhuiykov, Serge. / Atomic layer deposition-developed two-dimensional α-MoO3 windows excellent hydrogen peroxide electrochemical sensing capabilities. In: Sensors and Actuators, B: Chemical. 2018 ; Vol. 262. pp. 334-344.
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