Arc plasma deposition of TiSiN/Ni nanoscale multilayered coatings

Alina Vladescu, Viorel Braic, Mariana Braic, Mihai Balaceanu

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

Nanostructured alternate TiSiN/Ni multilayer coatings were deposited by the cathodic arc technique on Si, C45 and M2 steel substrates in nitrogen atmosphere. The films were investigated for elemental and phase composition, texture, modulation periodicity, microstructure, residual stress, hardness, adhesion and tribological behavior using X-ray photoelectron spectroscopy (XPS), glow discharge optical spectroscopy (GDOS), high angle X-ray diffraction (XRD), X-ray reflectivity (XRR), surface profilometry, hardness and adhesion measurements, and tribological tests. The characteristics of the multilayers, with bilayer periods ranging from ∼7 to 27 nm, were compared with those of the TiSiN single layer coating. Depending on the modulation period, the TiSiN/Ni coatings exhibited lower internal stress (0.19-0.76 GPa) and better adhesion (critical loads in the range 51-68 N) when compared to TiSiN films (1.96 GPa and 32 N, respectively). The maximum hardness (29.1 GPa), with a value 1.2 times the rule-of-mixtures value, was measured for the coating with the bilayer period of about 15 nm. A good wear and friction performance was found.

Original languageEnglish
Pages (from-to)500-506
Number of pages7
JournalMaterials Chemistry and Physics
Volume138
Issue number2-3
DOIs
Publication statusPublished - 15 Mar 2013
Externally publishedYes

Fingerprint

Plasma deposition
plasma jets
coatings
Coatings
adhesion
Adhesion
hardness
Hardness
residual stress
Residual stresses
Multilayers
Modulation
modulation
Profilometry
x rays
Steel
Glow discharges
Phase composition
glow discharges
periodic variations

Keywords

  • Cathodic arc deposition
  • Mechanical and tribological characteristics
  • TiSiN/Ni superlattice coatings

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics

Cite this

Arc plasma deposition of TiSiN/Ni nanoscale multilayered coatings. / Vladescu, Alina; Braic, Viorel; Braic, Mariana; Balaceanu, Mihai.

In: Materials Chemistry and Physics, Vol. 138, No. 2-3, 15.03.2013, p. 500-506.

Research output: Contribution to journalArticle

Vladescu, Alina ; Braic, Viorel ; Braic, Mariana ; Balaceanu, Mihai. / Arc plasma deposition of TiSiN/Ni nanoscale multilayered coatings. In: Materials Chemistry and Physics. 2013 ; Vol. 138, No. 2-3. pp. 500-506.
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