Arc plasma-assisted deposition of nanocrystalline coatings

O. V. Krysina, N. N. Koval, Yu F. Ivanov, V. V. Shugurov

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

The paper considers peculiarities of vacuum arc plasma-assisted deposition of multicomponent nanocrystalline coatings based on titanium nitride. Advantages and prospects of the modified ion plasma setup used for coating deposition are described. The effect of added elements on the structural phase state and characteristics of titanium nitride-based coatings is demonstrated.

Original languageEnglish
Title of host publicationProceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV
Pages537-540
Number of pages4
DOIs
Publication statusPublished - 2012
Event25th International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV 2012 - Tomsk, Russian Federation
Duration: 2 Sep 20127 Sep 2012

Other

Other25th International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV 2012
CountryRussian Federation
CityTomsk
Period2.9.127.9.12

Fingerprint

Titanium nitride
Plasmas
Coatings
Vacuum
Ions

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Software

Cite this

Krysina, O. V., Koval, N. N., Ivanov, Y. F., & Shugurov, V. V. (2012). Arc plasma-assisted deposition of nanocrystalline coatings. In Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV (pp. 537-540). [6412574] https://doi.org/10.1109/DEIV.2012.6412574

Arc plasma-assisted deposition of nanocrystalline coatings. / Krysina, O. V.; Koval, N. N.; Ivanov, Yu F.; Shugurov, V. V.

Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV. 2012. p. 537-540 6412574.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Krysina, OV, Koval, NN, Ivanov, YF & Shugurov, VV 2012, Arc plasma-assisted deposition of nanocrystalline coatings. in Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV., 6412574, pp. 537-540, 25th International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV 2012, Tomsk, Russian Federation, 2.9.12. https://doi.org/10.1109/DEIV.2012.6412574
Krysina OV, Koval NN, Ivanov YF, Shugurov VV. Arc plasma-assisted deposition of nanocrystalline coatings. In Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV. 2012. p. 537-540. 6412574 https://doi.org/10.1109/DEIV.2012.6412574
Krysina, O. V. ; Koval, N. N. ; Ivanov, Yu F. ; Shugurov, V. V. / Arc plasma-assisted deposition of nanocrystalline coatings. Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV. 2012. pp. 537-540
@inproceedings{a1118a29468e4c609475d549889d2a3e,
title = "Arc plasma-assisted deposition of nanocrystalline coatings",
abstract = "The paper considers peculiarities of vacuum arc plasma-assisted deposition of multicomponent nanocrystalline coatings based on titanium nitride. Advantages and prospects of the modified ion plasma setup used for coating deposition are described. The effect of added elements on the structural phase state and characteristics of titanium nitride-based coatings is demonstrated.",
author = "Krysina, {O. V.} and Koval, {N. N.} and Ivanov, {Yu F.} and Shugurov, {V. V.}",
year = "2012",
doi = "10.1109/DEIV.2012.6412574",
language = "English",
isbn = "9781467312660",
pages = "537--540",
booktitle = "Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV",

}

TY - GEN

T1 - Arc plasma-assisted deposition of nanocrystalline coatings

AU - Krysina, O. V.

AU - Koval, N. N.

AU - Ivanov, Yu F.

AU - Shugurov, V. V.

PY - 2012

Y1 - 2012

N2 - The paper considers peculiarities of vacuum arc plasma-assisted deposition of multicomponent nanocrystalline coatings based on titanium nitride. Advantages and prospects of the modified ion plasma setup used for coating deposition are described. The effect of added elements on the structural phase state and characteristics of titanium nitride-based coatings is demonstrated.

AB - The paper considers peculiarities of vacuum arc plasma-assisted deposition of multicomponent nanocrystalline coatings based on titanium nitride. Advantages and prospects of the modified ion plasma setup used for coating deposition are described. The effect of added elements on the structural phase state and characteristics of titanium nitride-based coatings is demonstrated.

UR - http://www.scopus.com/inward/record.url?scp=84873961634&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84873961634&partnerID=8YFLogxK

U2 - 10.1109/DEIV.2012.6412574

DO - 10.1109/DEIV.2012.6412574

M3 - Conference contribution

SN - 9781467312660

SP - 537

EP - 540

BT - Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV

ER -