Application of PVD methods to solid oxide fuel cells

A. A. Solovyev, N. S. Sochugov, S. V. Rabotkin, Anna Victorovna Shipilova, Igor Vyacheslavovich Ionov, Anastasia Nikolaevna Kovalchuk, Alena Olegovna Borduleva

Research output: Contribution to journalArticle

23 Citations (Scopus)

Abstract

In this paper, attention is paid to the application of such a method of vacuum physical vapor deposition (PVD) as magnetron sputtering for fabrication of a solid oxide fuel cell (SOFC) materials and structures. It is shown that the YSZ (yttria-stabilized zirconia) electrolyte and Ni-YSZ anode layers with required thickness, structure and composition can be effectively formed by PVD methods. The influence of parameters of pulsed power magnetron discharge on the deposition rate and the microstructure of the obtained YSZ electrolyte films were investigated. It is shown that the deposition rate of the oxide layers by magnetron sputtering can be significantly increased by using asymmetric bipolar power magnetrons, which creates serious prerequisites for applying this method on the industrial scale. Porous Ni-YSZ anode films were obtained by reactive co-sputtering of Ni and Zr-Y targets and subsequent reduction in the H 2 atmosphere at a temperature of 800°C. The Ni-YSZ films comprised small grains and pores of tens of nanometers.

Original languageEnglish
Pages (from-to)272-277
Number of pages6
JournalApplied Surface Science
Volume310
DOIs
Publication statusPublished - 15 Aug 2014

Fingerprint

Yttria stabilized zirconia
Physical vapor deposition
Solid oxide fuel cells (SOFC)
Deposition rates
Magnetron sputtering
Electrolytes
Anodes
Magnetrons
Oxides
Sputtering
Vacuum
Fabrication
Microstructure
Chemical analysis
Temperature

Keywords

  • Magnetron sputtering
  • Metal support
  • NiO/YSZ anode
  • Solid oxide fuel cell
  • Thin film
  • YSZ electrolyte

ASJC Scopus subject areas

  • Surfaces, Coatings and Films

Cite this

Solovyev, A. A., Sochugov, N. S., Rabotkin, S. V., Shipilova, A. V., Ionov, I. V., Kovalchuk, A. N., & Borduleva, A. O. (2014). Application of PVD methods to solid oxide fuel cells. Applied Surface Science, 310, 272-277. https://doi.org/10.1016/j.apsusc.2014.03.163

Application of PVD methods to solid oxide fuel cells. / Solovyev, A. A.; Sochugov, N. S.; Rabotkin, S. V.; Shipilova, Anna Victorovna; Ionov, Igor Vyacheslavovich; Kovalchuk, Anastasia Nikolaevna; Borduleva, Alena Olegovna.

In: Applied Surface Science, Vol. 310, 15.08.2014, p. 272-277.

Research output: Contribution to journalArticle

Solovyev, AA, Sochugov, NS, Rabotkin, SV, Shipilova, AV, Ionov, IV, Kovalchuk, AN & Borduleva, AO 2014, 'Application of PVD methods to solid oxide fuel cells', Applied Surface Science, vol. 310, pp. 272-277. https://doi.org/10.1016/j.apsusc.2014.03.163
Solovyev, A. A. ; Sochugov, N. S. ; Rabotkin, S. V. ; Shipilova, Anna Victorovna ; Ionov, Igor Vyacheslavovich ; Kovalchuk, Anastasia Nikolaevna ; Borduleva, Alena Olegovna. / Application of PVD methods to solid oxide fuel cells. In: Applied Surface Science. 2014 ; Vol. 310. pp. 272-277.
@article{611fb5e3214b470bafabc2cb87f45c05,
title = "Application of PVD methods to solid oxide fuel cells",
abstract = "In this paper, attention is paid to the application of such a method of vacuum physical vapor deposition (PVD) as magnetron sputtering for fabrication of a solid oxide fuel cell (SOFC) materials and structures. It is shown that the YSZ (yttria-stabilized zirconia) electrolyte and Ni-YSZ anode layers with required thickness, structure and composition can be effectively formed by PVD methods. The influence of parameters of pulsed power magnetron discharge on the deposition rate and the microstructure of the obtained YSZ electrolyte films were investigated. It is shown that the deposition rate of the oxide layers by magnetron sputtering can be significantly increased by using asymmetric bipolar power magnetrons, which creates serious prerequisites for applying this method on the industrial scale. Porous Ni-YSZ anode films were obtained by reactive co-sputtering of Ni and Zr-Y targets and subsequent reduction in the H 2 atmosphere at a temperature of 800°C. The Ni-YSZ films comprised small grains and pores of tens of nanometers.",
keywords = "Magnetron sputtering, Metal support, NiO/YSZ anode, Solid oxide fuel cell, Thin film, YSZ electrolyte",
author = "Solovyev, {A. A.} and Sochugov, {N. S.} and Rabotkin, {S. V.} and Shipilova, {Anna Victorovna} and Ionov, {Igor Vyacheslavovich} and Kovalchuk, {Anastasia Nikolaevna} and Borduleva, {Alena Olegovna}",
year = "2014",
month = "8",
day = "15",
doi = "10.1016/j.apsusc.2014.03.163",
language = "English",
volume = "310",
pages = "272--277",
journal = "Applied Surface Science",
issn = "0169-4332",
publisher = "Elsevier",

}

TY - JOUR

T1 - Application of PVD methods to solid oxide fuel cells

AU - Solovyev, A. A.

AU - Sochugov, N. S.

AU - Rabotkin, S. V.

AU - Shipilova, Anna Victorovna

AU - Ionov, Igor Vyacheslavovich

AU - Kovalchuk, Anastasia Nikolaevna

AU - Borduleva, Alena Olegovna

PY - 2014/8/15

Y1 - 2014/8/15

N2 - In this paper, attention is paid to the application of such a method of vacuum physical vapor deposition (PVD) as magnetron sputtering for fabrication of a solid oxide fuel cell (SOFC) materials and structures. It is shown that the YSZ (yttria-stabilized zirconia) electrolyte and Ni-YSZ anode layers with required thickness, structure and composition can be effectively formed by PVD methods. The influence of parameters of pulsed power magnetron discharge on the deposition rate and the microstructure of the obtained YSZ electrolyte films were investigated. It is shown that the deposition rate of the oxide layers by magnetron sputtering can be significantly increased by using asymmetric bipolar power magnetrons, which creates serious prerequisites for applying this method on the industrial scale. Porous Ni-YSZ anode films were obtained by reactive co-sputtering of Ni and Zr-Y targets and subsequent reduction in the H 2 atmosphere at a temperature of 800°C. The Ni-YSZ films comprised small grains and pores of tens of nanometers.

AB - In this paper, attention is paid to the application of such a method of vacuum physical vapor deposition (PVD) as magnetron sputtering for fabrication of a solid oxide fuel cell (SOFC) materials and structures. It is shown that the YSZ (yttria-stabilized zirconia) electrolyte and Ni-YSZ anode layers with required thickness, structure and composition can be effectively formed by PVD methods. The influence of parameters of pulsed power magnetron discharge on the deposition rate and the microstructure of the obtained YSZ electrolyte films were investigated. It is shown that the deposition rate of the oxide layers by magnetron sputtering can be significantly increased by using asymmetric bipolar power magnetrons, which creates serious prerequisites for applying this method on the industrial scale. Porous Ni-YSZ anode films were obtained by reactive co-sputtering of Ni and Zr-Y targets and subsequent reduction in the H 2 atmosphere at a temperature of 800°C. The Ni-YSZ films comprised small grains and pores of tens of nanometers.

KW - Magnetron sputtering

KW - Metal support

KW - NiO/YSZ anode

KW - Solid oxide fuel cell

KW - Thin film

KW - YSZ electrolyte

UR - http://www.scopus.com/inward/record.url?scp=84903315279&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84903315279&partnerID=8YFLogxK

U2 - 10.1016/j.apsusc.2014.03.163

DO - 10.1016/j.apsusc.2014.03.163

M3 - Article

VL - 310

SP - 272

EP - 277

JO - Applied Surface Science

JF - Applied Surface Science

SN - 0169-4332

ER -