Abstract
In this paper, attention is paid to the application of such a method of vacuum physical vapor deposition (PVD) as magnetron sputtering for fabrication of a solid oxide fuel cell (SOFC) materials and structures. It is shown that the YSZ (yttria-stabilized zirconia) electrolyte and Ni-YSZ anode layers with required thickness, structure and composition can be effectively formed by PVD methods. The influence of parameters of pulsed power magnetron discharge on the deposition rate and the microstructure of the obtained YSZ electrolyte films were investigated. It is shown that the deposition rate of the oxide layers by magnetron sputtering can be significantly increased by using asymmetric bipolar power magnetrons, which creates serious prerequisites for applying this method on the industrial scale. Porous Ni-YSZ anode films were obtained by reactive co-sputtering of Ni and Zr-Y targets and subsequent reduction in the H 2 atmosphere at a temperature of 800°C. The Ni-YSZ films comprised small grains and pores of tens of nanometers.
| Original language | English |
|---|---|
| Pages (from-to) | 272-277 |
| Number of pages | 6 |
| Journal | Applied Surface Science |
| Volume | 310 |
| DOIs | |
| Publication status | Published - 15 Aug 2014 |
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Keywords
- Magnetron sputtering
- Metal support
- NiO/YSZ anode
- Solid oxide fuel cell
- Thin film
- YSZ electrolyte
ASJC Scopus subject areas
- Surfaces, Coatings and Films
Cite this
Application of PVD methods to solid oxide fuel cells. / Solovyev, A. A.; Sochugov, N. S.; Rabotkin, S. V.; Shipilova, Anna Victorovna; Ionov, Igor Vyacheslavovich; Kovalchuk, Anastasia Nikolaevna; Borduleva, Alena Olegovna.
In: Applied Surface Science, Vol. 310, 15.08.2014, p. 272-277.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Application of PVD methods to solid oxide fuel cells
AU - Solovyev, A. A.
AU - Sochugov, N. S.
AU - Rabotkin, S. V.
AU - Shipilova, Anna Victorovna
AU - Ionov, Igor Vyacheslavovich
AU - Kovalchuk, Anastasia Nikolaevna
AU - Borduleva, Alena Olegovna
PY - 2014/8/15
Y1 - 2014/8/15
N2 - In this paper, attention is paid to the application of such a method of vacuum physical vapor deposition (PVD) as magnetron sputtering for fabrication of a solid oxide fuel cell (SOFC) materials and structures. It is shown that the YSZ (yttria-stabilized zirconia) electrolyte and Ni-YSZ anode layers with required thickness, structure and composition can be effectively formed by PVD methods. The influence of parameters of pulsed power magnetron discharge on the deposition rate and the microstructure of the obtained YSZ electrolyte films were investigated. It is shown that the deposition rate of the oxide layers by magnetron sputtering can be significantly increased by using asymmetric bipolar power magnetrons, which creates serious prerequisites for applying this method on the industrial scale. Porous Ni-YSZ anode films were obtained by reactive co-sputtering of Ni and Zr-Y targets and subsequent reduction in the H 2 atmosphere at a temperature of 800°C. The Ni-YSZ films comprised small grains and pores of tens of nanometers.
AB - In this paper, attention is paid to the application of such a method of vacuum physical vapor deposition (PVD) as magnetron sputtering for fabrication of a solid oxide fuel cell (SOFC) materials and structures. It is shown that the YSZ (yttria-stabilized zirconia) electrolyte and Ni-YSZ anode layers with required thickness, structure and composition can be effectively formed by PVD methods. The influence of parameters of pulsed power magnetron discharge on the deposition rate and the microstructure of the obtained YSZ electrolyte films were investigated. It is shown that the deposition rate of the oxide layers by magnetron sputtering can be significantly increased by using asymmetric bipolar power magnetrons, which creates serious prerequisites for applying this method on the industrial scale. Porous Ni-YSZ anode films were obtained by reactive co-sputtering of Ni and Zr-Y targets and subsequent reduction in the H 2 atmosphere at a temperature of 800°C. The Ni-YSZ films comprised small grains and pores of tens of nanometers.
KW - Magnetron sputtering
KW - Metal support
KW - NiO/YSZ anode
KW - Solid oxide fuel cell
KW - Thin film
KW - YSZ electrolyte
UR - http://www.scopus.com/inward/record.url?scp=84903315279&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84903315279&partnerID=8YFLogxK
U2 - 10.1016/j.apsusc.2014.03.163
DO - 10.1016/j.apsusc.2014.03.163
M3 - Article
AN - SCOPUS:84903315279
VL - 310
SP - 272
EP - 277
JO - Applied Surface Science
JF - Applied Surface Science
SN - 0169-4332
ER -