Abstract
The results of investigations concerning some applications of high-power ion beams (HPIBs) to materials surface modification are presented. For BPIB-based film deposition, the characteristics of obtained coatings were studied depending on deposition conditions. It has been shown that mechanical and adhesion properties of the films are improved with decreasing deposition rate. For the combined surface treatment comprising traditional ion implantation and BPIB irradiation, the mass transfer of implanted dopant was investigated at multiple implantation-irradiation cycles. It has been demonstrated that one can control the depth of occurrence and storage of the implanted dopant.
| Original language | English |
|---|---|
| Title of host publication | 15th International Conference on High-Power Particle Beams - Proceedings, BEAMS-2004 |
| Pages | 622-625 |
| Number of pages | 4 |
| Publication status | Published - 2004 |
| Event | 15th International Conference on High-Power Particle Beams, BEAMS-2004 - St. Petersburg, Russian Federation Duration: 18 Jul 2004 → 23 Jul 2004 |
Other
| Other | 15th International Conference on High-Power Particle Beams, BEAMS-2004 |
|---|---|
| Country | Russian Federation |
| City | St. Petersburg |
| Period | 18.7.04 → 23.7.04 |
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ASJC Scopus subject areas
- Nuclear and High Energy Physics
Cite this
Application of high-power ion beams to thin films deposition and stimulating mass transfer of previously implanted dopants in materials. / Ryabchikov, Alexandr I.; Matvienko, Vasily M.; Petrov, Anatoli V.; Struts, Vasily K.; Usov, Yury Petrovich; Shlapakovski, Anatoli S.
15th International Conference on High-Power Particle Beams - Proceedings, BEAMS-2004. 2004. p. 622-625 6220622.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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TY - GEN
T1 - Application of high-power ion beams to thin films deposition and stimulating mass transfer of previously implanted dopants in materials
AU - Ryabchikov, Alexandr I.
AU - Matvienko, Vasily M.
AU - Petrov, Anatoli V.
AU - Struts, Vasily K.
AU - Usov, Yury Petrovich
AU - Shlapakovski, Anatoli S.
PY - 2004
Y1 - 2004
N2 - The results of investigations concerning some applications of high-power ion beams (HPIBs) to materials surface modification are presented. For BPIB-based film deposition, the characteristics of obtained coatings were studied depending on deposition conditions. It has been shown that mechanical and adhesion properties of the films are improved with decreasing deposition rate. For the combined surface treatment comprising traditional ion implantation and BPIB irradiation, the mass transfer of implanted dopant was investigated at multiple implantation-irradiation cycles. It has been demonstrated that one can control the depth of occurrence and storage of the implanted dopant.
AB - The results of investigations concerning some applications of high-power ion beams (HPIBs) to materials surface modification are presented. For BPIB-based film deposition, the characteristics of obtained coatings were studied depending on deposition conditions. It has been shown that mechanical and adhesion properties of the films are improved with decreasing deposition rate. For the combined surface treatment comprising traditional ion implantation and BPIB irradiation, the mass transfer of implanted dopant was investigated at multiple implantation-irradiation cycles. It has been demonstrated that one can control the depth of occurrence and storage of the implanted dopant.
UR - http://www.scopus.com/inward/record.url?scp=84864262781&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84864262781&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84864262781
SN - 5879110885
SN - 9785879110883
SP - 622
EP - 625
BT - 15th International Conference on High-Power Particle Beams - Proceedings, BEAMS-2004
ER -