Application of high-power ion beams to thin films deposition and stimulating mass transfer of previously implanted dopants in materials

Alexandr I. Ryabchikov, Vasily M. Matvienko, Anatoli V. Petrov, Vasily K. Struts, Yury Petrovich Usov, Anatoli S. Shlapakovski

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The results of investigations concerning some applications of high-power ion beams (HPIBs) to materials surface modification are presented. For BPIB-based film deposition, the characteristics of obtained coatings were studied depending on deposition conditions. It has been shown that mechanical and adhesion properties of the films are improved with decreasing deposition rate. For the combined surface treatment comprising traditional ion implantation and BPIB irradiation, the mass transfer of implanted dopant was investigated at multiple implantation-irradiation cycles. It has been demonstrated that one can control the depth of occurrence and storage of the implanted dopant.

Original languageEnglish
Title of host publication15th International Conference on High-Power Particle Beams - Proceedings, BEAMS-2004
Pages622-625
Number of pages4
Publication statusPublished - 2004
Event15th International Conference on High-Power Particle Beams, BEAMS-2004 - St. Petersburg, Russian Federation
Duration: 18 Jul 200423 Jul 2004

Other

Other15th International Conference on High-Power Particle Beams, BEAMS-2004
CountryRussian Federation
CitySt. Petersburg
Period18.7.0423.7.04

Fingerprint

mass transfer
ion beams
thin films
irradiation
surface treatment
ion implantation
implantation
adhesion
mechanical properties
occurrences
coatings
cycles

ASJC Scopus subject areas

  • Nuclear and High Energy Physics

Cite this

Ryabchikov, A. I., Matvienko, V. M., Petrov, A. V., Struts, V. K., Usov, YP., & Shlapakovski, A. S. (2004). Application of high-power ion beams to thin films deposition and stimulating mass transfer of previously implanted dopants in materials. In 15th International Conference on High-Power Particle Beams - Proceedings, BEAMS-2004 (pp. 622-625). [6220622]

Application of high-power ion beams to thin films deposition and stimulating mass transfer of previously implanted dopants in materials. / Ryabchikov, Alexandr I.; Matvienko, Vasily M.; Petrov, Anatoli V.; Struts, Vasily K.; Usov, Yury Petrovich; Shlapakovski, Anatoli S.

15th International Conference on High-Power Particle Beams - Proceedings, BEAMS-2004. 2004. p. 622-625 6220622.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ryabchikov, AI, Matvienko, VM, Petrov, AV, Struts, VK, Usov, YP & Shlapakovski, AS 2004, Application of high-power ion beams to thin films deposition and stimulating mass transfer of previously implanted dopants in materials. in 15th International Conference on High-Power Particle Beams - Proceedings, BEAMS-2004., 6220622, pp. 622-625, 15th International Conference on High-Power Particle Beams, BEAMS-2004, St. Petersburg, Russian Federation, 18.7.04.
Ryabchikov AI, Matvienko VM, Petrov AV, Struts VK, Usov YP, Shlapakovski AS. Application of high-power ion beams to thin films deposition and stimulating mass transfer of previously implanted dopants in materials. In 15th International Conference on High-Power Particle Beams - Proceedings, BEAMS-2004. 2004. p. 622-625. 6220622
Ryabchikov, Alexandr I. ; Matvienko, Vasily M. ; Petrov, Anatoli V. ; Struts, Vasily K. ; Usov, Yury Petrovich ; Shlapakovski, Anatoli S. / Application of high-power ion beams to thin films deposition and stimulating mass transfer of previously implanted dopants in materials. 15th International Conference on High-Power Particle Beams - Proceedings, BEAMS-2004. 2004. pp. 622-625
@inproceedings{bb08c63deb454c4d8a24cd72300513eb,
title = "Application of high-power ion beams to thin films deposition and stimulating mass transfer of previously implanted dopants in materials",
abstract = "The results of investigations concerning some applications of high-power ion beams (HPIBs) to materials surface modification are presented. For BPIB-based film deposition, the characteristics of obtained coatings were studied depending on deposition conditions. It has been shown that mechanical and adhesion properties of the films are improved with decreasing deposition rate. For the combined surface treatment comprising traditional ion implantation and BPIB irradiation, the mass transfer of implanted dopant was investigated at multiple implantation-irradiation cycles. It has been demonstrated that one can control the depth of occurrence and storage of the implanted dopant.",
author = "Ryabchikov, {Alexandr I.} and Matvienko, {Vasily M.} and Petrov, {Anatoli V.} and Struts, {Vasily K.} and Yury Petrovich Usov and Shlapakovski, {Anatoli S.}",
year = "2004",
language = "English",
isbn = "5879110885",
pages = "622--625",
booktitle = "15th International Conference on High-Power Particle Beams - Proceedings, BEAMS-2004",

}

TY - GEN

T1 - Application of high-power ion beams to thin films deposition and stimulating mass transfer of previously implanted dopants in materials

AU - Ryabchikov, Alexandr I.

AU - Matvienko, Vasily M.

AU - Petrov, Anatoli V.

AU - Struts, Vasily K.

AU - Usov, Yury Petrovich

AU - Shlapakovski, Anatoli S.

PY - 2004

Y1 - 2004

N2 - The results of investigations concerning some applications of high-power ion beams (HPIBs) to materials surface modification are presented. For BPIB-based film deposition, the characteristics of obtained coatings were studied depending on deposition conditions. It has been shown that mechanical and adhesion properties of the films are improved with decreasing deposition rate. For the combined surface treatment comprising traditional ion implantation and BPIB irradiation, the mass transfer of implanted dopant was investigated at multiple implantation-irradiation cycles. It has been demonstrated that one can control the depth of occurrence and storage of the implanted dopant.

AB - The results of investigations concerning some applications of high-power ion beams (HPIBs) to materials surface modification are presented. For BPIB-based film deposition, the characteristics of obtained coatings were studied depending on deposition conditions. It has been shown that mechanical and adhesion properties of the films are improved with decreasing deposition rate. For the combined surface treatment comprising traditional ion implantation and BPIB irradiation, the mass transfer of implanted dopant was investigated at multiple implantation-irradiation cycles. It has been demonstrated that one can control the depth of occurrence and storage of the implanted dopant.

UR - http://www.scopus.com/inward/record.url?scp=84864262781&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84864262781&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84864262781

SN - 5879110885

SN - 9785879110883

SP - 622

EP - 625

BT - 15th International Conference on High-Power Particle Beams - Proceedings, BEAMS-2004

ER -