Application of high-power ion beams to thin films deposition and stimulating mass transfer of previously implanted dopants in materials

Abstract

The results of investigations concerning some applications of high-power ion beams (HPIBs) to materials surface modification are presented. For BPIB-based film deposition, the characteristics of obtained coatings were studied depending on deposition conditions. It has been shown that mechanical and adhesion properties of the films are improved with decreasing deposition rate. For the combined surface treatment comprising traditional ion implantation and BPIB irradiation, the mass transfer of implanted dopant was investigated at multiple implantation-irradiation cycles. It has been demonstrated that one can control the depth of occurrence and storage of the implanted dopant.

Original language	English
Title of host publication	15th International Conference on High-Power Particle Beams - Proceedings, BEAMS-2004
Pages	622-625
Number of pages	4
Publication status	Published - 2004
Event	15th International Conference on High-Power Particle Beams, BEAMS-2004 - St. Petersburg, Russian Federation Duration: 18 Jul 2004 → 23 Jul 2004

Other

Other	15th International Conference on High-Power Particle Beams, BEAMS-2004
Country	Russian Federation
City	St. Petersburg
Period	18.7.04 → 23.7.04

ASJC Scopus subject areas

Nuclear and High Energy Physics

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Application of high-power ion beams to thin films deposition and stimulating mass transfer of previously implanted dopants in materials. / Ryabchikov, Alexandr I.; Matvienko, Vasily M.; Petrov, Anatoli V.; Struts, Vasily K.; Usov, Yury Petrovich; Shlapakovski, Anatoli S.

15th International Conference on High-Power Particle Beams - Proceedings, BEAMS-2004. 2004. p. 622-625 6220622.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Ryabchikov, AI, Matvienko, VM, Petrov, AV, Struts, VK, Usov, YP & Shlapakovski, AS 2004, Application of high-power ion beams to thin films deposition and stimulating mass transfer of previously implanted dopants in materials. in 15th International Conference on High-Power Particle Beams - Proceedings, BEAMS-2004., 6220622, pp. 622-625, 15th International Conference on High-Power Particle Beams, BEAMS-2004, St. Petersburg, Russian Federation, 18.7.04.

Ryabchikov, Alexandr I. ; Matvienko, Vasily M. ; Petrov, Anatoli V. ; Struts, Vasily K. ; Usov, Yury Petrovich ; Shlapakovski, Anatoli S. / Application of high-power ion beams to thin films deposition and stimulating mass transfer of previously implanted dopants in materials. 15th International Conference on High-Power Particle Beams - Proceedings, BEAMS-2004. 2004. pp. 622-625

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title = "Application of high-power ion beams to thin films deposition and stimulating mass transfer of previously implanted dopants in materials",

abstract = "The results of investigations concerning some applications of high-power ion beams (HPIBs) to materials surface modification are presented. For BPIB-based film deposition, the characteristics of obtained coatings were studied depending on deposition conditions. It has been shown that mechanical and adhesion properties of the films are improved with decreasing deposition rate. For the combined surface treatment comprising traditional ion implantation and BPIB irradiation, the mass transfer of implanted dopant was investigated at multiple implantation-irradiation cycles. It has been demonstrated that one can control the depth of occurrence and storage of the implanted dopant.",

author = "Ryabchikov, {Alexandr I.} and Matvienko, {Vasily M.} and Petrov, {Anatoli V.} and Struts, {Vasily K.} and Yury Petrovich Usov and Shlapakovski, {Anatoli S.}",

year = "2004",

language = "English",

isbn = "5879110885",

pages = "622--625",

booktitle = "15th International Conference on High-Power Particle Beams - Proceedings, BEAMS-2004",

note = "15th International Conference on High-Power Particle Beams, BEAMS-2004 ; Conference date: 18-07-2004 Through 23-07-2004",

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T1 - Application of high-power ion beams to thin films deposition and stimulating mass transfer of previously implanted dopants in materials

AU - Ryabchikov, Alexandr I.

AU - Matvienko, Vasily M.

AU - Petrov, Anatoli V.

AU - Struts, Vasily K.

AU - Usov, Yury Petrovich

AU - Shlapakovski, Anatoli S.

PY - 2004

Y1 - 2004

N2 - The results of investigations concerning some applications of high-power ion beams (HPIBs) to materials surface modification are presented. For BPIB-based film deposition, the characteristics of obtained coatings were studied depending on deposition conditions. It has been shown that mechanical and adhesion properties of the films are improved with decreasing deposition rate. For the combined surface treatment comprising traditional ion implantation and BPIB irradiation, the mass transfer of implanted dopant was investigated at multiple implantation-irradiation cycles. It has been demonstrated that one can control the depth of occurrence and storage of the implanted dopant.

AB - The results of investigations concerning some applications of high-power ion beams (HPIBs) to materials surface modification are presented. For BPIB-based film deposition, the characteristics of obtained coatings were studied depending on deposition conditions. It has been shown that mechanical and adhesion properties of the films are improved with decreasing deposition rate. For the combined surface treatment comprising traditional ion implantation and BPIB irradiation, the mass transfer of implanted dopant was investigated at multiple implantation-irradiation cycles. It has been demonstrated that one can control the depth of occurrence and storage of the implanted dopant.

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M3 - Conference contribution

AN - SCOPUS:84864262781

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SP - 622

EP - 625

BT - 15th International Conference on High-Power Particle Beams - Proceedings, BEAMS-2004

T2 - 15th International Conference on High-Power Particle Beams, BEAMS-2004

Y2 - 18 July 2004 through 23 July 2004

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