Application of high-power ion beams to thin films deposition and stimulating mass transfer of previously implanted dopants in materials

Alexandr I. Ryabchikov, Vasily M. Matvienko, Anatoli V. Petrov, Vasily K. Struts, Yury Petrovich Usov, Anatoli S. Shlapakovski

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

The results of investigations concerning some applications of high-power ion beams (HPIBs) to materials surface modification are presented. For BPIB-based film deposition, the characteristics of obtained coatings were studied depending on deposition conditions. It has been shown that mechanical and adhesion properties of the films are improved with decreasing deposition rate. For the combined surface treatment comprising traditional ion implantation and BPIB irradiation, the mass transfer of implanted dopant was investigated at multiple implantation-irradiation cycles. It has been demonstrated that one can control the depth of occurrence and storage of the implanted dopant.

Original languageEnglish
Title of host publication15th International Conference on High-Power Particle Beams - Proceedings, BEAMS-2004
Pages622-625
Number of pages4
Publication statusPublished - 2004
Event15th International Conference on High-Power Particle Beams, BEAMS-2004 - St. Petersburg, Russian Federation
Duration: 18 Jul 200423 Jul 2004

Other

Other15th International Conference on High-Power Particle Beams, BEAMS-2004
CountryRussian Federation
CitySt. Petersburg
Period18.7.0423.7.04

ASJC Scopus subject areas

  • Nuclear and High Energy Physics

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