Application of high-power ion beams for technology

Research School of High-Energy Physics

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Abstract

Industrial applications of high-power ion beams, basically in the field of material engineering, are presented. The results of experimental investigations of some kinds of applications, such as ion implantation, metal modification, and compounds production of thin films, are considered.

Original language	English
Pages (from-to)	707-731
Number of pages	25
Journal	Laser and Particle Beams
Volume	11
Issue number	4
Publication status	Published - 1993

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)
Surfaces and Interfaces

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title = "Application of high-power ion beams for technology",

abstract = "Industrial applications of high-power ion beams, basically in the field of material engineering, are presented. The results of experimental investigations of some kinds of applications, such as ion implantation, metal modification, and compounds production of thin films, are considered.",

author = "Remnev, {G. E.} and Shulov, {V. A.}",

year = "1993",

language = "English",

volume = "11",

pages = "707--731",

journal = "Laser and Particle Beams",

issn = "0263-0346",

publisher = "Cambridge University Press",

number = "4",

}

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AU - Remnev, G. E.

AU - Shulov, V. A.

PY - 1993

Y1 - 1993

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AB - Industrial applications of high-power ion beams, basically in the field of material engineering, are presented. The results of experimental investigations of some kinds of applications, such as ion implantation, metal modification, and compounds production of thin films, are considered.

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VL - 11

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JO - Laser and Particle Beams

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SN - 0263-0346

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