Application of high-power ion beams for technology

G. E. Remnev, V. A. Shulov

Research output: Contribution to journalArticle

78 Citations (Scopus)

Abstract

Industrial applications of high-power ion beams, basically in the field of material engineering, are presented. The results of experimental investigations of some kinds of applications, such as ion implantation, metal modification, and compounds production of thin films, are considered.

Original languageEnglish
Pages (from-to)707-731
Number of pages25
JournalLaser and Particle Beams
Volume11
Issue number4
Publication statusPublished - 1993

Fingerprint

Ion implantation
Ion beams
Industrial applications
ion beams
Thin films
Metals
ion implantation
engineering
thin films
metals

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)
  • Surfaces and Interfaces

Cite this

Application of high-power ion beams for technology. / Remnev, G. E.; Shulov, V. A.

In: Laser and Particle Beams, Vol. 11, No. 4, 1993, p. 707-731.

Research output: Contribution to journalArticle

Remnev, G. E. ; Shulov, V. A. / Application of high-power ion beams for technology. In: Laser and Particle Beams. 1993 ; Vol. 11, No. 4. pp. 707-731.
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