Abstract
Industrial applications of high-power ion beams, basically in the field of material engineering, are presented. The results of experimental investigations of some kinds of applications, such as ion implantation, metal modification, and compounds production of thin films, are considered.
| Original language | English |
|---|---|
| Pages (from-to) | 707-731 |
| Number of pages | 25 |
| Journal | Laser and Particle Beams |
| Volume | 11 |
| Issue number | 4 |
| Publication status | Published - 1993 |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
- Surfaces and Interfaces