Abstract
Industrial applications of high-power ion beams, basically in the field of material engineering, are presented. The results of experimental investigations of some kinds of applications, such as ion implantation, metal modification, and compounds production of thin films, are considered.
| Original language | English |
|---|---|
| Pages (from-to) | 707-731 |
| Number of pages | 25 |
| Journal | Laser and Particle Beams |
| Volume | 11 |
| Issue number | 4 |
| Publication status | Published - 1993 |
Fingerprint
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
- Surfaces and Interfaces
Cite this
Application of high-power ion beams for technology. / Remnev, G. E.; Shulov, V. A.
In: Laser and Particle Beams, Vol. 11, No. 4, 1993, p. 707-731.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Application of high-power ion beams for technology
AU - Remnev, G. E.
AU - Shulov, V. A.
PY - 1993
Y1 - 1993
N2 - Industrial applications of high-power ion beams, basically in the field of material engineering, are presented. The results of experimental investigations of some kinds of applications, such as ion implantation, metal modification, and compounds production of thin films, are considered.
AB - Industrial applications of high-power ion beams, basically in the field of material engineering, are presented. The results of experimental investigations of some kinds of applications, such as ion implantation, metal modification, and compounds production of thin films, are considered.
UR - http://www.scopus.com/inward/record.url?scp=0027840870&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0027840870&partnerID=8YFLogxK
M3 - Article
VL - 11
SP - 707
EP - 731
JO - Laser and Particle Beams
JF - Laser and Particle Beams
SN - 0263-0346
IS - 4
ER -