Abstract
Poly(methyl methacrylate) (PMMA) surface was patterned by laser scanning and Ga and Au layers of different thicknesses were sputtered onto modified polymer surface. The metal/PMMA structures were annealed at 160 C for 1 h and the changes in the surface morphology were examined by AFM and STM techniques. It was found that sufficiently thick and continuous metal coverage protect the underlying pattern structure.
Original language | English |
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Pages (from-to) | 3541-3545 |
Number of pages | 5 |
Journal | Journal of Materials Science: Materials in Electronics |
Volume | 24 |
Issue number | 9 |
DOIs | |
Publication status | Published - 1 Sep 2013 |
Externally published | Yes |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Electrical and Electronic Engineering