Annealing of laser patterned PMMA coated with gold and gallium

Abstract

Poly(methyl methacrylate) (PMMA) surface was patterned by laser scanning and Ga and Au layers of different thicknesses were sputtered onto modified polymer surface. The metal/PMMA structures were annealed at 160 C for 1 h and the changes in the surface morphology were examined by AFM and STM techniques. It was found that sufficiently thick and continuous metal coverage protect the underlying pattern structure.

Original language	English
Pages (from-to)	3541-3545
Number of pages	5
Journal	Journal of Materials Science: Materials in Electronics
Volume	24
Issue number	9
DOIs	https://doi.org/10.1007/s10854-013-1282-3
Publication status	Published - 1 Sep 2013
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering

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10.1007/s10854-013-1282-3

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Cite this

Lyutakov, O., Tuma, J., Kalachyova, Y., Huttel, I., Prajzler, V., & Svorcik, V. (2013). Annealing of laser patterned PMMA coated with gold and gallium. Journal of Materials Science: Materials in Electronics, 24(9), 3541-3545. https://doi.org/10.1007/s10854-013-1282-3

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abstract = "Poly(methyl methacrylate) (PMMA) surface was patterned by laser scanning and Ga and Au layers of different thicknesses were sputtered onto modified polymer surface. The metal/PMMA structures were annealed at 160 C for 1 h and the changes in the surface morphology were examined by AFM and STM techniques. It was found that sufficiently thick and continuous metal coverage protect the underlying pattern structure.",

author = "O. Lyutakov and J. Tuma and Y. Kalachyova and I. Huttel and V. Prajzler and V. Svorcik",

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AU - Lyutakov, O.

AU - Tuma, J.

AU - Kalachyova, Y.

AU - Huttel, I.

AU - Prajzler, V.

AU - Svorcik, V.

PY - 2013/9/1

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N2 - Poly(methyl methacrylate) (PMMA) surface was patterned by laser scanning and Ga and Au layers of different thicknesses were sputtered onto modified polymer surface. The metal/PMMA structures were annealed at 160 C for 1 h and the changes in the surface morphology were examined by AFM and STM techniques. It was found that sufficiently thick and continuous metal coverage protect the underlying pattern structure.

AB - Poly(methyl methacrylate) (PMMA) surface was patterned by laser scanning and Ga and Au layers of different thicknesses were sputtered onto modified polymer surface. The metal/PMMA structures were annealed at 160 C for 1 h and the changes in the surface morphology were examined by AFM and STM techniques. It was found that sufficiently thick and continuous metal coverage protect the underlying pattern structure.

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