Annealing of laser patterned PMMA coated with gold and gallium

O. Lyutakov, J. Tuma, Y. Kalachyova, I. Huttel, V. Prajzler, V. Svorcik

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Abstract

Poly(methyl methacrylate) (PMMA) surface was patterned by laser scanning and Ga and Au layers of different thicknesses were sputtered onto modified polymer surface. The metal/PMMA structures were annealed at 160 C for 1 h and the changes in the surface morphology were examined by AFM and STM techniques. It was found that sufficiently thick and continuous metal coverage protect the underlying pattern structure.

Original languageEnglish
Pages (from-to)3541-3545
Number of pages5
JournalJournal of Materials Science: Materials in Electronics
Volume24
Issue number9
DOIs
Publication statusPublished - 1 Sep 2013
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Annealing of laser patterned PMMA coated with gold and gallium'. Together they form a unique fingerprint.

Cite this