Analysis of correctness of intense ion beam diagnostics based on the ion-current density

Research output: Contribution to journalArticle

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Abstract

The results of a comparative analysis of the correctness of intense-ion-beam diagnostics, which is based on measurements of the ion-current-density and energy-density amplitudes, are presented. It is shown that when a nanosecond-duration pulsed ion beam is used to modify a surface, the main factor that determines changes in the properties of a treated item is a thermal effect rather than the ion implantation. The analysis of the influence of such factors as the ion-energy variation, the ion-beam composition, accelerated neutrals, the variation in the accelerating voltage, the diagnostics locality, and other factors on the accuracy of controlling the ion-beam impact on a target was performed. It was found that analyzing the stability of the thermal effect of an ion beam on the target on the basis of the amplitude of an ion-current density pulse yields an overestimated standard-deviation value. It was shown that measurements of the energy density provide more accurate and complete information that does not contain systematic errors.

Original languageEnglish
Pages (from-to)667-674
Number of pages8
JournalInstruments and Experimental Techniques
Volume58
Issue number5
DOIs
Publication statusPublished - 1 Sep 2015

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Ion beams
ion currents
Current density
ion beams
current density
Ions
Thermal effects
temperature effects
flux density
Systematic errors
Ion implantation
systematic errors
ion implantation
standard deviation
Electric potential
electric potential
pulses
Chemical analysis
ions
energy

ASJC Scopus subject areas

  • Instrumentation

Cite this

Analysis of correctness of intense ion beam diagnostics based on the ion-current density. / Pushkarev, A. I.; Isakova, Y. I.; Khaylov, I. P.

In: Instruments and Experimental Techniques, Vol. 58, No. 5, 01.09.2015, p. 667-674.

Research output: Contribution to journalArticle

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