Analysis of correctness of intense ion beam diagnostics based on the ion-current density

Abstract

The results of a comparative analysis of the correctness of intense-ion-beam diagnostics, which is based on measurements of the ion-current-density and energy-density amplitudes, are presented. It is shown that when a nanosecond-duration pulsed ion beam is used to modify a surface, the main factor that determines changes in the properties of a treated item is a thermal effect rather than the ion implantation. The analysis of the influence of such factors as the ion-energy variation, the ion-beam composition, accelerated neutrals, the variation in the accelerating voltage, the diagnostics locality, and other factors on the accuracy of controlling the ion-beam impact on a target was performed. It was found that analyzing the stability of the thermal effect of an ion beam on the target on the basis of the amplitude of an ion-current density pulse yields an overestimated standard-deviation value. It was shown that measurements of the energy density provide more accurate and complete information that does not contain systematic errors.

Original language	English
Pages (from-to)	667-674
Number of pages	8
Journal	Instruments and Experimental Techniques
Volume	58
Issue number	5
DOIs	https://doi.org/10.1134/S0020441215040090
Publication status	Published - 1 Sep 2015

ASJC Scopus subject areas

Instrumentation

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title = "Analysis of correctness of intense ion beam diagnostics based on the ion-current density",

abstract = "The results of a comparative analysis of the correctness of intense-ion-beam diagnostics, which is based on measurements of the ion-current-density and energy-density amplitudes, are presented. It is shown that when a nanosecond-duration pulsed ion beam is used to modify a surface, the main factor that determines changes in the properties of a treated item is a thermal effect rather than the ion implantation. The analysis of the influence of such factors as the ion-energy variation, the ion-beam composition, accelerated neutrals, the variation in the accelerating voltage, the diagnostics locality, and other factors on the accuracy of controlling the ion-beam impact on a target was performed. It was found that analyzing the stability of the thermal effect of an ion beam on the target on the basis of the amplitude of an ion-current density pulse yields an overestimated standard-deviation value. It was shown that measurements of the energy density provide more accurate and complete information that does not contain systematic errors.",

author = "Pushkarev, {A. I.} and Isakova, {Y. I.} and Khaylov, {I. P.}",

year = "2015",

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T1 - Analysis of correctness of intense ion beam diagnostics based on the ion-current density

AU - Pushkarev, A. I.

AU - Isakova, Y. I.

AU - Khaylov, I. P.

PY - 2015/9/1

Y1 - 2015/9/1

N2 - The results of a comparative analysis of the correctness of intense-ion-beam diagnostics, which is based on measurements of the ion-current-density and energy-density amplitudes, are presented. It is shown that when a nanosecond-duration pulsed ion beam is used to modify a surface, the main factor that determines changes in the properties of a treated item is a thermal effect rather than the ion implantation. The analysis of the influence of such factors as the ion-energy variation, the ion-beam composition, accelerated neutrals, the variation in the accelerating voltage, the diagnostics locality, and other factors on the accuracy of controlling the ion-beam impact on a target was performed. It was found that analyzing the stability of the thermal effect of an ion beam on the target on the basis of the amplitude of an ion-current density pulse yields an overestimated standard-deviation value. It was shown that measurements of the energy density provide more accurate and complete information that does not contain systematic errors.

AB - The results of a comparative analysis of the correctness of intense-ion-beam diagnostics, which is based on measurements of the ion-current-density and energy-density amplitudes, are presented. It is shown that when a nanosecond-duration pulsed ion beam is used to modify a surface, the main factor that determines changes in the properties of a treated item is a thermal effect rather than the ion implantation. The analysis of the influence of such factors as the ion-energy variation, the ion-beam composition, accelerated neutrals, the variation in the accelerating voltage, the diagnostics locality, and other factors on the accuracy of controlling the ion-beam impact on a target was performed. It was found that analyzing the stability of the thermal effect of an ion beam on the target on the basis of the amplitude of an ion-current density pulse yields an overestimated standard-deviation value. It was shown that measurements of the energy density provide more accurate and complete information that does not contain systematic errors.

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