Abstract
The results of a comparative analysis of the correctness of intense-ion-beam diagnostics, which is based on measurements of the ion-current-density and energy-density amplitudes, are presented. It is shown that when a nanosecond-duration pulsed ion beam is used to modify a surface, the main factor that determines changes in the properties of a treated item is a thermal effect rather than the ion implantation. The analysis of the influence of such factors as the ion-energy variation, the ion-beam composition, accelerated neutrals, the variation in the accelerating voltage, the diagnostics locality, and other factors on the accuracy of controlling the ion-beam impact on a target was performed. It was found that analyzing the stability of the thermal effect of an ion beam on the target on the basis of the amplitude of an ion-current density pulse yields an overestimated standard-deviation value. It was shown that measurements of the energy density provide more accurate and complete information that does not contain systematic errors.
| Original language | English |
|---|---|
| Pages (from-to) | 667-674 |
| Number of pages | 8 |
| Journal | Instruments and Experimental Techniques |
| Volume | 58 |
| Issue number | 5 |
| DOIs | |
| Publication status | Published - 1 Sep 2015 |
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ASJC Scopus subject areas
- Instrumentation
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Analysis of correctness of intense ion beam diagnostics based on the ion-current density. / Pushkarev, A. I.; Isakova, Y. I.; Khaylov, I. P.
In: Instruments and Experimental Techniques, Vol. 58, No. 5, 01.09.2015, p. 667-674.Research output: Contribution to journal › Article
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TY - JOUR
T1 - Analysis of correctness of intense ion beam diagnostics based on the ion-current density
AU - Pushkarev, A. I.
AU - Isakova, Y. I.
AU - Khaylov, I. P.
PY - 2015/9/1
Y1 - 2015/9/1
N2 - The results of a comparative analysis of the correctness of intense-ion-beam diagnostics, which is based on measurements of the ion-current-density and energy-density amplitudes, are presented. It is shown that when a nanosecond-duration pulsed ion beam is used to modify a surface, the main factor that determines changes in the properties of a treated item is a thermal effect rather than the ion implantation. The analysis of the influence of such factors as the ion-energy variation, the ion-beam composition, accelerated neutrals, the variation in the accelerating voltage, the diagnostics locality, and other factors on the accuracy of controlling the ion-beam impact on a target was performed. It was found that analyzing the stability of the thermal effect of an ion beam on the target on the basis of the amplitude of an ion-current density pulse yields an overestimated standard-deviation value. It was shown that measurements of the energy density provide more accurate and complete information that does not contain systematic errors.
AB - The results of a comparative analysis of the correctness of intense-ion-beam diagnostics, which is based on measurements of the ion-current-density and energy-density amplitudes, are presented. It is shown that when a nanosecond-duration pulsed ion beam is used to modify a surface, the main factor that determines changes in the properties of a treated item is a thermal effect rather than the ion implantation. The analysis of the influence of such factors as the ion-energy variation, the ion-beam composition, accelerated neutrals, the variation in the accelerating voltage, the diagnostics locality, and other factors on the accuracy of controlling the ion-beam impact on a target was performed. It was found that analyzing the stability of the thermal effect of an ion beam on the target on the basis of the amplitude of an ion-current density pulse yields an overestimated standard-deviation value. It was shown that measurements of the energy density provide more accurate and complete information that does not contain systematic errors.
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U2 - 10.1134/S0020441215040090
DO - 10.1134/S0020441215040090
M3 - Article
VL - 58
SP - 667
EP - 674
JO - Instruments and Experimental Techniques
JF - Instruments and Experimental Techniques
SN - 0020-4412
IS - 5
ER -