Analysis of concentration field formation in titanium under aluminum ion implantation via a gas-and-metal film deposited on a target surface

G. A. Vershinin, T. S. Grekova, G. I. Gering, I. A. Kurzina, Yu P. Sharkeev

Research output: Contribution to journalArticle

Abstract

The concentration profiles of aluminum ions in polycrystalline titanium implanted by the polychromatic beam from a vacuum arc source via a gas-and-metal film deposited on a target surface are analyzed.

Original languageEnglish
Pages (from-to)251-254
Number of pages4
JournalJournal of Surface Investigation
Volume6
Issue number2
DOIs
Publication statusPublished - Apr 2012

Fingerprint

Titanium
Aluminum
Ion implantation
Gases
Metals
Vacuum
Ions

ASJC Scopus subject areas

  • Surfaces, Coatings and Films

Cite this

Analysis of concentration field formation in titanium under aluminum ion implantation via a gas-and-metal film deposited on a target surface. / Vershinin, G. A.; Grekova, T. S.; Gering, G. I.; Kurzina, I. A.; Sharkeev, Yu P.

In: Journal of Surface Investigation, Vol. 6, No. 2, 04.2012, p. 251-254.

Research output: Contribution to journalArticle

@article{72e38c79ad344f61b6c8975a5237dece,
title = "Analysis of concentration field formation in titanium under aluminum ion implantation via a gas-and-metal film deposited on a target surface",
abstract = "The concentration profiles of aluminum ions in polycrystalline titanium implanted by the polychromatic beam from a vacuum arc source via a gas-and-metal film deposited on a target surface are analyzed.",
author = "Vershinin, {G. A.} and Grekova, {T. S.} and Gering, {G. I.} and Kurzina, {I. A.} and Sharkeev, {Yu P.}",
year = "2012",
month = "4",
doi = "10.1134/S1027451012030226",
language = "English",
volume = "6",
pages = "251--254",
journal = "Journal of Surface Investigation",
issn = "1027-4510",
publisher = "Maik Nauka-Interperiodica Publishing",
number = "2",

}

TY - JOUR

T1 - Analysis of concentration field formation in titanium under aluminum ion implantation via a gas-and-metal film deposited on a target surface

AU - Vershinin, G. A.

AU - Grekova, T. S.

AU - Gering, G. I.

AU - Kurzina, I. A.

AU - Sharkeev, Yu P.

PY - 2012/4

Y1 - 2012/4

N2 - The concentration profiles of aluminum ions in polycrystalline titanium implanted by the polychromatic beam from a vacuum arc source via a gas-and-metal film deposited on a target surface are analyzed.

AB - The concentration profiles of aluminum ions in polycrystalline titanium implanted by the polychromatic beam from a vacuum arc source via a gas-and-metal film deposited on a target surface are analyzed.

UR - http://www.scopus.com/inward/record.url?scp=84859850162&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84859850162&partnerID=8YFLogxK

U2 - 10.1134/S1027451012030226

DO - 10.1134/S1027451012030226

M3 - Article

VL - 6

SP - 251

EP - 254

JO - Journal of Surface Investigation

JF - Journal of Surface Investigation

SN - 1027-4510

IS - 2

ER -