An Outlook on Potentialities and Limits in Using Epitaxial Polysilicon for MEMS Real-Time Clocks

Giorgio Mussi, Marco Bestetti, Valentina Zega, Attilio A. Frangi, Gabriele Gattere, Giacomo Langfelder

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

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Engineering & Materials Science