An implanter with a mixed ion beam for modifying the properties of the surface of construction materials

Abstract

An accelerator with the energy of single-charged ions to 70 keV and the total current to 100 mA to modify the properties of construction materials is designed. A two-step universal ion source based on low-pressure discharge with the sputtering of the targets by plasma makes it possible to obtain gas and dropless mixed beams of charged particles with a controlled ratio of Me⁺/G⁺ ions in the accelerator, which works like a bipolar diode.

Original language	English
Pages (from-to)	103-108
Number of pages	6
Journal	Russian Journal of Non-Ferrous Metals
Volume	52
Issue number	1
DOIs	https://doi.org/10.3103/S1067821211010202
Publication status	Published - Feb 2011

Keywords

ion source
mixed ion source
modifying
sputtering
vapor-gas plasma

ASJC Scopus subject areas

Mechanics of Materials
Metals and Alloys
Surfaces, Coatings and Films

Access to Document

10.3103/S1067821211010202

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@article{ba830458176c424aba5cf595d99c3575,

title = "An implanter with a mixed ion beam for modifying the properties of the surface of construction materials",

abstract = "An accelerator with the energy of single-charged ions to 70 keV and the total current to 100 mA to modify the properties of construction materials is designed. A two-step universal ion source based on low-pressure discharge with the sputtering of the targets by plasma makes it possible to obtain gas and dropless mixed beams of charged particles with a controlled ratio of Me+/G+ ions in the accelerator, which works like a bipolar diode.",

keywords = "ion source, mixed ion source, modifying, sputtering, vapor-gas plasma",

author = "Potemkin, {G. V.}",

year = "2011",

month = feb,

doi = "10.3103/S1067821211010202",

language = "English",

volume = "52",

pages = "103--108",

journal = "Russian Journal of Non-Ferrous Metals",

issn = "1067-8212",

publisher = "Springer Science + Business Media",

number = "1",

}

TY - JOUR

T1 - An implanter with a mixed ion beam for modifying the properties of the surface of construction materials

AU - Potemkin, G. V.

PY - 2011/2

Y1 - 2011/2

N2 - An accelerator with the energy of single-charged ions to 70 keV and the total current to 100 mA to modify the properties of construction materials is designed. A two-step universal ion source based on low-pressure discharge with the sputtering of the targets by plasma makes it possible to obtain gas and dropless mixed beams of charged particles with a controlled ratio of Me+/G+ ions in the accelerator, which works like a bipolar diode.

AB - An accelerator with the energy of single-charged ions to 70 keV and the total current to 100 mA to modify the properties of construction materials is designed. A two-step universal ion source based on low-pressure discharge with the sputtering of the targets by plasma makes it possible to obtain gas and dropless mixed beams of charged particles with a controlled ratio of Me+/G+ ions in the accelerator, which works like a bipolar diode.

KW - ion source

KW - mixed ion source

KW - modifying

KW - sputtering

KW - vapor-gas plasma

UR - http://www.scopus.com/inward/record.url?scp=79952456443&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79952456443&partnerID=8YFLogxK

U2 - 10.3103/S1067821211010202

DO - 10.3103/S1067821211010202

M3 - Article

AN - SCOPUS:79952456443

VL - 52

SP - 103

EP - 108

JO - Russian Journal of Non-Ferrous Metals

JF - Russian Journal of Non-Ferrous Metals

SN - 1067-8212

IS - 1